{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/110486"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/110486","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Design, fabrication, and characterization of a lithium niobate optomechanical photodetector based on released whispering-gallery-mode microdisk resonators","abstract":"Lithium Niobate (LiNbO3) is a piezoelectric material that also exhibits promising optical characteristics such as low optical loss and high electro-optic coefficient, making it an interesting choice for Radio Frequency (RF) micro-opto-electro-mechanical systems (MOEMS) and devices, electro-optical modulators and tunable filters, and other high-speed and low-loss photonic devices. In this work, an opto-electro-mechanical device for detecting light power is developed on a Lithium Niobate platform using a combination of Whispering-Gallery-Mode (WGM) micro-disk optical resonators and suspended RF MEMS acoustic resonators. The fundamental idea behind this device is changing the device’s measured impedance by shifting the resonance frequency of the acoustic resonator, which is performed by an increase in the temperature of the device caused by the input light. The theory, design, simulation, fabrication process, as well as the measured response of the device are presented. The device manifests a responsivity of up to 123 Ω/mW or %3.44/mW at its 3.5 GHz fundamental mode. Lastly, the results are analyzed, and potential ideas for future research based on this work are proposed.","abstract_html":"Lithium Niobate (LiNbO3) is a piezoelectric material that also exhibits promising optical characteristics such as low optical loss and high electro-optic coefficient, making it an interesting choice for Radio Frequency (RF) micro-opto-electro-mechanical systems (MOEMS) and devices, electro-optical modulators and tunable filters, and other high-speed and low-loss photonic devices. In this work, an opto-electro-mechanical device for detecting light power is developed on a Lithium Niobate platform using a combination of Whispering-Gallery-Mode (WGM) micro-disk optical resonators and suspended RF MEMS acoustic resonators. The fundamental idea behind this device is changing the device’s measured impedance by shifting the resonance frequency of the acoustic resonator, which is performed by an increase in the temperature of the device caused by the input light. The theory, design, simulation, fabrication process, as well as the measured response of the device are presented. The device manifests a responsivity of up to 123 Ω/mW or %3.44/mW at its 3.5 GHz fundamental mode. Lastly, the results are analyzed, and potential ideas for future research based on this work are proposed.","abstract_has_math":false,"creators":["Meygoo Lavasani, Ali"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":["Gong, Songbin"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2021,"date_issued":"2021-09-17T01:10:59Z","date_published":"2021-09-17T01:10:59Z","updated_at":"2026-07-22T22:24:50Z","subjects":["Lithium Niobate, Whispering-Gallery-Mode (WGM) Micro-disk Optical Resonators, RF MEMS Acoustic Resonators, Optomechanical Photodetector."],"languages":["en"],"rights":["Copyright 2021 Ali Lavasani"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/110486","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Gong, Songbin"]},{"key":"dc:creator","label":"Author","values":["Meygoo Lavasani, Ali"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2021-09-17T01:10:59Z","2021-04-16","2021-05"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Lithium Niobate, Whispering-Gallery-Mode (WGM) Micro-disk Optical Resonators, RF MEMS Acoustic Resonators, Optomechanical Photodetector."]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2021 Ali Lavasani"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/110486"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Lithium Niobate (LiNbO3) is a piezoelectric material that also exhibits promising optical characteristics such as low optical loss and high electro-optic coefficient, making it an interesting choice for Radio Frequency (RF) micro-opto-electro-mechanical systems (MOEMS) and devices, electro-optical modulators and tunable filters, and other high-speed and low-loss photonic devices. In this work, an opto-electro-mechanical device for detecting light power is developed on a Lithium Niobate platform using a combination of Whispering-Gallery-Mode (WGM) micro-disk optical resonators and suspended RF MEMS acoustic resonators. The fundamental idea behind this device is changing the device’s measured impedance by shifting the resonance frequency of the acoustic resonator, which is performed by an increase in the temperature of the device caused by the input light. The theory, design, simulation, fabrication process, as well as the measured response of the device are presented. The device manifests a responsivity of up to 123 Ω/mW or %3.44/mW at its 3.5 GHz fundamental mode. Lastly, the results are analyzed, and potential ideas for future research based on this work are proposed.","Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2021-09-16 without embargo terms","The student, Ali Meygoo Lavasani, accepted the attached license on 2021-04-15 at 22:46.","The student, Ali Meygoo Lavasani, submitted this Thesis for approval on 2021-04-15 at 23:04.","This Thesis was approved for publication on 2021-04-16 at 14:24.","DSpace SAF Submission Ingestion Package generated from Vireo submission #16362 on 2021-09-16 at 16:42:09","Made available in DSpace on 2021-09-17T01:10:59Z (GMT). No. of bitstreams: 2 MEYGOOLAVASANI-THESIS-2021.pdf: 2957410 bytes, checksum: 1ae971b077bc1878dea52109058e0a47 (MD5) LICENSE.txt: 4216 bytes, checksum: 0f85e4f6d371a9476d075dc9b603b05b (MD5) Previous issue date: 2021-04-16"]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Design, fabrication, and characterization of a lithium niobate optomechanical photodetector based on released whispering-gallery-mode microdisk resonators"]}]}],"canonical_facts":{"dc:contributor":["Gong, Songbin"],"dc:creator":["Meygoo Lavasani, Ali"],"dc:date":["2021-09-17T01:10:59Z","2021-04-16","2021-05"],"dc:description":["Lithium Niobate (LiNbO3) is a piezoelectric material that also exhibits promising optical characteristics such as low optical loss and high electro-optic coefficient, making it an interesting choice for Radio Frequency (RF) micro-opto-electro-mechanical systems (MOEMS) and devices, electro-optical modulators and tunable filters, and other high-speed and low-loss photonic devices. In this work, an opto-electro-mechanical device for detecting light power is developed on a Lithium Niobate platform using a combination of Whispering-Gallery-Mode (WGM) micro-disk optical resonators and suspended RF MEMS acoustic resonators. The fundamental idea behind this device is changing the device’s measured impedance by shifting the resonance frequency of the acoustic resonator, which is performed by an increase in the temperature of the device caused by the input light. The theory, design, simulation, fabrication process, as well as the measured response of the device are presented. The device manifests a responsivity of up to 123 Ω/mW or %3.44/mW at its 3.5 GHz fundamental mode. Lastly, the results are analyzed, and potential ideas for future research based on this work are proposed.","Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2021-09-16 without embargo terms","The student, Ali Meygoo Lavasani, accepted the attached license on 2021-04-15 at 22:46.","The student, Ali Meygoo Lavasani, submitted this Thesis for approval on 2021-04-15 at 23:04.","This Thesis was approved for publication on 2021-04-16 at 14:24.","DSpace SAF Submission Ingestion Package generated from Vireo submission #16362 on 2021-09-16 at 16:42:09","Made available in DSpace on 2021-09-17T01:10:59Z (GMT). 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