{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/108712"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/108712","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"K-band lithium niobate microelectromechanical system hybrid filters","abstract":"As the sub-6G spectrum becomes overcrowded with applications, the research community has begun to explore beyond 6 GHz for new spectral venues to advance wireless capabilities. Acoustic filters are indispensable front-end components in telecommunication, which is challenging to scale to higher frequencies. Frequency scaling without compromising performance remains challenging due to various technical bottlenecks in material integration, device fabrication, and filter design for acoustic filters. This thesis presents the design approach as well as the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small size and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter are also presented in this thesis, which allows this technology to be applied for filters with different center frequencies and FBWs. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system-level. The fabricated filter is built with the seventh-order antisymmetric Lamb wave mode (A7) resonators with an electromechanical coupling of 0.7%. The measurements show a 3 dB FBW of 2.4% at 19 GHz, and a compact footprint of 1.4 mm2.","abstract_html":"As the sub-6G spectrum becomes overcrowded with applications, the research community has begun to explore beyond 6 GHz for new spectral venues to advance wireless capabilities. Acoustic filters are indispensable front-end components in telecommunication, which is challenging to scale to higher frequencies. Frequency scaling without compromising performance remains challenging due to various technical bottlenecks in material integration, device fabrication, and filter design for acoustic filters. This thesis presents the design approach as well as the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small size and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter are also presented in this thesis, which allows this technology to be applied for filters with different center frequencies and FBWs. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system-level. The fabricated filter is built with the seventh-order antisymmetric Lamb wave mode (A7) resonators with an electromechanical coupling of 0.7%. The measurements show a 3 dB FBW of 2.4% at 19 GHz, and a compact footprint of 1.4 mm2.","abstract_has_math":false,"creators":["Gao, Liuqing"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":["Gong, Songbin"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2020,"date_issued":"2020-10-07T22:50:01Z","date_published":"2020-10-07T22:50:01Z","updated_at":"2026-07-22T22:24:48Z","subjects":["microelectromechanical systems","millimeter-wave devices","piezoelectric devices","K-band"],"languages":["en"],"rights":["Copyright 2020 Liuqing Gao"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/108712","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Gong, Songbin"]},{"key":"dc:creator","label":"Author","values":["Gao, Liuqing"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2020-10-07T22:50:01Z","2022-10-07T22:50:13Z","2020-07-20","2020-08"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["microelectromechanical systems","millimeter-wave devices","piezoelectric devices","K-band"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2020 Liuqing Gao"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/108712"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["As the sub-6G spectrum becomes overcrowded with applications, the research community has begun to explore beyond 6 GHz for new spectral venues to advance wireless capabilities. Acoustic filters are indispensable front-end components in telecommunication, which is challenging to scale to higher frequencies. Frequency scaling without compromising performance remains challenging due to various technical bottlenecks in material integration, device fabrication, and filter design for acoustic filters. This thesis presents the design approach as well as the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small size and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter are also presented in this thesis, which allows this technology to be applied for filters with different center frequencies and FBWs. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system-level. The fabricated filter is built with the seventh-order antisymmetric Lamb wave mode (A7) resonators with an electromechanical coupling of 0.7%. The measurements show a 3 dB FBW of 2.4% at 19 GHz, and a compact footprint of 1.4 mm2.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2022-08-01","The student, Liuqing Gao, accepted the attached license on 2020-07-16 at 10:19.","The student, Liuqing Gao, submitted this Thesis for approval on 2020-07-16 at 10:28.","This Thesis was approved for publication on 2020-07-20 at 09:18.","DSpace SAF Submission Ingestion Package generated from Vireo submission #15652 on 2020-10-02 at 15:51:11","Made available in DSpace on 2020-10-07T22:50:01Z (GMT). No. of bitstreams: 2 GAO-THESIS-2020.pdf: 2615417 bytes, checksum: b3d913f2f24b09b4c253a58d34a8d1ff (MD5) LICENSE.txt: 4208 bytes, checksum: 039e115e53ff4146385026b05307b52a (MD5) Previous issue date: 2020-07-20","Embargo set by: Seth Robbins for item 116341 Lift date: 2022-10-07T22:50:13Z Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system","Author requested closed access (OA after 2yrs) in Vireo ETD system","Limited"]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["K-band lithium niobate microelectromechanical system hybrid filters"]}]}],"canonical_facts":{"dc:contributor":["Gong, Songbin"],"dc:creator":["Gao, Liuqing"],"dc:date":["2020-10-07T22:50:01Z","2022-10-07T22:50:13Z","2020-07-20","2020-08"],"dc:description":["As the sub-6G spectrum becomes overcrowded with applications, the research community has begun to explore beyond 6 GHz for new spectral venues to advance wireless capabilities. Acoustic filters are indispensable front-end components in telecommunication, which is challenging to scale to higher frequencies. Frequency scaling without compromising performance remains challenging due to various technical bottlenecks in material integration, device fabrication, and filter design for acoustic filters. This thesis presents the design approach as well as the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small size and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter are also presented in this thesis, which allows this technology to be applied for filters with different center frequencies and FBWs. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system-level. The fabricated filter is built with the seventh-order antisymmetric Lamb wave mode (A7) resonators with an electromechanical coupling of 0.7%. The measurements show a 3 dB FBW of 2.4% at 19 GHz, and a compact footprint of 1.4 mm2.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2022-08-01","The student, Liuqing Gao, accepted the attached license on 2020-07-16 at 10:19.","The student, Liuqing Gao, submitted this Thesis for approval on 2020-07-16 at 10:28.","This Thesis was approved for publication on 2020-07-20 at 09:18.","DSpace SAF Submission Ingestion Package generated from Vireo submission #15652 on 2020-10-02 at 15:51:11","Made available in DSpace on 2020-10-07T22:50:01Z (GMT). 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