{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/106316"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/106316","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Advancing acoustic filters for 5G front-ends: Lithium niobate piezoelectric MEMS resonators and filters","abstract":"As the telecommunication industry moves towards 5G to support the increasing demand for broadband services, development of new front-end technologies is gaining steam to target higher performance at higher frequencies. A class of front-end components that have consistently received much research attention for 5G are the piezoelectric acoustic or MEMS resonators, filters, and multiplexers, as they remain essential for accessing the crowded RF spectrum with low loss, high interference rejection, and small form factors. This dissertation reports on the design, fabrication, and demonstration of a new class of microelectromechanical system (MEMS) resonators and filters operating in the 5G mid- and high-frequency bands. The 5G mid-band (Sub-6 GHz) resonances have been achieved by employing the first order asymmetric (A1) Lamb wave mode in the Z-cut and Y-cut lithium niobate (LiNbO3) thin films. The fabricated devices based on Z-cut LiNbO3 demonstrated an electromechanical coupling (kt2) of 30%, which is more than three times of current commercial solutions. The fabricated devices based on Y-cut LiNbO3 demonstrated a figure-of-merit (FoM) of 435, which is the highest in acoustic resonators over 1 GHz. The 5G mid-band devices marked the first time that a new resonator technology outperforms the state-of-the-arts. The 5G high-band (over-24 GHz) resonances have been demonstrated by employing the higher-order asymmetric Lamb wave modes in Z-cut LiNbO3 thin films, which marks the highest acoustic resonance in LiNbO3. The wide range of frequency operation and high performance of these A-modes devices have proven their potential as the key building blocks for future 5G front-end filters and multiplexers. Based on these breakthroughs, a new class of C-band and X-band acoustic filters is designed and demonstrated. The fabricated C-band acoustic filters demonstrated a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2. The fabricated X-band acoustic filters demonstrated a 3-dB bandwidth of 70 MHz, an IL of 3.7 dB, and a compact footprint of 0.35 mm2. The work demonstrated in this dissertation show the strong potential of LiNbO3 A-modes filters for 5G RF front-ends.","abstract_html":"As the telecommunication industry moves towards 5G to support the increasing demand for broadband services, development of new front-end technologies is gaining steam to target higher performance at higher frequencies. A class of front-end components that have consistently received much research attention for 5G are the piezoelectric acoustic or MEMS resonators, filters, and multiplexers, as they remain essential for accessing the crowded RF spectrum with low loss, high interference rejection, and small form factors. This dissertation reports on the design, fabrication, and demonstration of a new class of microelectromechanical system (MEMS) resonators and filters operating in the 5G mid- and high-frequency bands. The 5G mid-band (Sub-6 GHz) resonances have been achieved by employing the first order asymmetric (A1) Lamb wave mode in the Z-cut and Y-cut lithium niobate (LiNbO3) thin films. The fabricated devices based on Z-cut LiNbO3 demonstrated an electromechanical coupling (kt2) of 30%, which is more than three times of current commercial solutions. The fabricated devices based on Y-cut LiNbO3 demonstrated a figure-of-merit (FoM) of 435, which is the highest in acoustic resonators over 1 GHz. The 5G mid-band devices marked the first time that a new resonator technology outperforms the state-of-the-arts. The 5G high-band (over-24 GHz) resonances have been demonstrated by employing the higher-order asymmetric Lamb wave modes in Z-cut LiNbO3 thin films, which marks the highest acoustic resonance in LiNbO3. The wide range of frequency operation and high performance of these A-modes devices have proven their potential as the key building blocks for future 5G front-end filters and multiplexers. Based on these breakthroughs, a new class of C-band and X-band acoustic filters is designed and demonstrated. The fabricated C-band acoustic filters demonstrated a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2. The fabricated X-band acoustic filters demonstrated a 3-dB bandwidth of 70 MHz, an IL of 3.7 dB, and a compact footprint of 0.35 mm2. The work demonstrated in this dissertation show the strong potential of LiNbO3 A-modes filters for 5G RF front-ends.","abstract_has_math":false,"creators":["Yang, Yansong"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":["Gong, Songbin","Cunningham, Brian T.","Goddard, Lynford L.","Zhou, Jin"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2020,"date_issued":"2020-03-02T22:12:07Z","date_published":"2020-03-02T22:12:07Z","updated_at":"2026-07-22T22:24:45Z","subjects":["5G, front-ends, Mid-band, High-band, mmWave, MEMS, Acoustic, Resonators, Filters, lithium niobate,"],"languages":["en"],"rights":["Copyright 2019 Yansong Yang"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/106316","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Gong, Songbin","Cunningham, Brian T.","Goddard, Lynford L.","Zhou, Jin"]},{"key":"dc:creator","label":"Author","values":["Yang, Yansong"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2020-03-02T22:12:07Z","2022-03-03T10:15:30Z","2019-09-20","2019-12"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["5G, front-ends, Mid-band, High-band, mmWave, MEMS, Acoustic, Resonators, Filters, lithium niobate,"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2019 Yansong Yang"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/106316"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["As the telecommunication industry moves towards 5G to support the increasing demand for broadband services, development of new front-end technologies is gaining steam to target higher performance at higher frequencies. A class of front-end components that have consistently received much research attention for 5G are the piezoelectric acoustic or MEMS resonators, filters, and multiplexers, as they remain essential for accessing the crowded RF spectrum with low loss, high interference rejection, and small form factors. This dissertation reports on the design, fabrication, and demonstration of a new class of microelectromechanical system (MEMS) resonators and filters operating in the 5G mid- and high-frequency bands. The 5G mid-band (Sub-6 GHz) resonances have been achieved by employing the first order asymmetric (A1) Lamb wave mode in the Z-cut and Y-cut lithium niobate (LiNbO3) thin films. The fabricated devices based on Z-cut LiNbO3 demonstrated an electromechanical coupling (kt2) of 30%, which is more than three times of current commercial solutions. The fabricated devices based on Y-cut LiNbO3 demonstrated a figure-of-merit (FoM) of 435, which is the highest in acoustic resonators over 1 GHz. The 5G mid-band devices marked the first time that a new resonator technology outperforms the state-of-the-arts. The 5G high-band (over-24 GHz) resonances have been demonstrated by employing the higher-order asymmetric Lamb wave modes in Z-cut LiNbO3 thin films, which marks the highest acoustic resonance in LiNbO3. The wide range of frequency operation and high performance of these A-modes devices have proven their potential as the key building blocks for future 5G front-end filters and multiplexers. Based on these breakthroughs, a new class of C-band and X-band acoustic filters is designed and demonstrated. The fabricated C-band acoustic filters demonstrated a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2. The fabricated X-band acoustic filters demonstrated a 3-dB bandwidth of 70 MHz, an IL of 3.7 dB, and a compact footprint of 0.35 mm2. The work demonstrated in this dissertation show the strong potential of LiNbO3 A-modes filters for 5G RF front-ends.","Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2021-12-01","The student, Yansong Yang, accepted the attached license on 2019-09-19 at 13:21.","The student, Yansong Yang, submitted this Dissertation for approval on 2019-09-19 at 13:33.","This Dissertation was approved for publication on 2019-09-20 at 11:56.","DSpace SAF Submission Ingestion Package generated from Vireo submission #14461 on 2020-02-28 at 17:20:23","Made available in DSpace on 2020-03-02T22:12:07Z (GMT). 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A class of front-end components that have consistently received much research attention for 5G are the piezoelectric acoustic or MEMS resonators, filters, and multiplexers, as they remain essential for accessing the crowded RF spectrum with low loss, high interference rejection, and small form factors. This dissertation reports on the design, fabrication, and demonstration of a new class of microelectromechanical system (MEMS) resonators and filters operating in the 5G mid- and high-frequency bands. The 5G mid-band (Sub-6 GHz) resonances have been achieved by employing the first order asymmetric (A1) Lamb wave mode in the Z-cut and Y-cut lithium niobate (LiNbO3) thin films. The fabricated devices based on Z-cut LiNbO3 demonstrated an electromechanical coupling (kt2) of 30%, which is more than three times of current commercial solutions. The fabricated devices based on Y-cut LiNbO3 demonstrated a figure-of-merit (FoM) of 435, which is the highest in acoustic resonators over 1 GHz. The 5G mid-band devices marked the first time that a new resonator technology outperforms the state-of-the-arts. The 5G high-band (over-24 GHz) resonances have been demonstrated by employing the higher-order asymmetric Lamb wave modes in Z-cut LiNbO3 thin films, which marks the highest acoustic resonance in LiNbO3. The wide range of frequency operation and high performance of these A-modes devices have proven their potential as the key building blocks for future 5G front-end filters and multiplexers. Based on these breakthroughs, a new class of C-band and X-band acoustic filters is designed and demonstrated. The fabricated C-band acoustic filters demonstrated a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2. The fabricated X-band acoustic filters demonstrated a 3-dB bandwidth of 70 MHz, an IL of 3.7 dB, and a compact footprint of 0.35 mm2. The work demonstrated in this dissertation show the strong potential of LiNbO3 A-modes filters for 5G RF front-ends.","Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2021-12-01","The student, Yansong Yang, accepted the attached license on 2019-09-19 at 13:21.","The student, Yansong Yang, submitted this Dissertation for approval on 2019-09-19 at 13:33.","This Dissertation was approved for publication on 2019-09-20 at 11:56.","DSpace SAF Submission Ingestion Package generated from Vireo submission #14461 on 2020-02-28 at 17:20:23","Made available in DSpace on 2020-03-02T22:12:07Z (GMT). No. of bitstreams: 3 YANG-DISSERTATION-2019.pdf: 13425409 bytes, checksum: 222074072cde0601c75230ebed6663ae (MD5) LICENSE.txt: 4209 bytes, checksum: 93184aaccc951f51d23fbc77bf6ff493 (MD5) PROQUEST_LICENSE.txt: 4555 bytes, checksum: 8f7333151b5cf78de149b0ca879e2a94 (MD5) Previous issue date: 2019-09-20","Embargo set by: Seth Robbins for item 113857 Lift date: 2022-03-02T22:12:26Z Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system","Embargo set by: Seth Robbins for item 113857 Lift date: 2022-03-02T22:15:21Z Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system","Embargo set by: Seth Robbins for item 113857 Lift date: 2022-03-02T22:18:25Z Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system","U of I Only Restriction Lifted for Item 113857 on 2022-03-03T10:15:30Z."],"dc:format":["application/pdf"],"dc:identifier":["http://hdl.handle.net/2142/106316"],"dc:language":["en"],"dc:rights":["Copyright 2019 Yansong Yang"],"dc:subject":["5G, front-ends, Mid-band, High-band, mmWave, MEMS, Acoustic, Resonators, Filters, lithium niobate,"],"dc:title":["Advancing acoustic filters for 5G front-ends: Lithium niobate piezoelectric MEMS resonators and filters"],"dc:type":["text"],"thesis:degree_discipline":["Electrical & Computer Engr"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:24:45Z"}