{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/105279"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/105279","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM","abstract":"This thesis presents a method to experimentally calibrate the contact stiffness of an atomic force microscope (AFM) cantilever tip in contact with a surface, which is a critical step in the measurement of nano-mechanical properties. The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). We present design, modeling, fabrication and characterization of a novel calibration sample, which consists of a series of rigid copper disks of varying diameter on top of a soft PDMS substrate. Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes.","abstract_html":"This thesis presents a method to experimentally calibrate the contact stiffness of an atomic force microscope (AFM) cantilever tip in contact with a surface, which is a critical step in the measurement of nano-mechanical properties. The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). We present design, modeling, fabrication and characterization of a novel calibration sample, which consists of a series of rigid copper disks of varying diameter on top of a soft PDMS substrate. Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes.","abstract_has_math":false,"creators":["Chen, Sihan"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["King, William P."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2019,"date_issued":"2019-08-23T20:48:28Z","date_published":"2019-08-23T20:48:28Z","updated_at":"2026-07-22T22:24:44Z","subjects":["contact stiffness","AFM","calibration"],"languages":["en"],"rights":["Copyright 2015 by Sihan Chen. 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Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2017-08-01","The student, Sihan Chen, accepted the attached license on 2015-07-20 at 12:25.","The student, Sihan Chen, submitted this Thesis for approval on 2015-07-20 at 12:30.","This Thesis was approved for publication on 2015-07-20 at 15:06.","DSpace SAF Submission Ingestion Package generated from Vireo submission #8564 on 2019-08-22 at 16:17:27","Made available in DSpace on 2019-08-23T20:48:28Z (GMT). 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The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). We present design, modeling, fabrication and characterization of a novel calibration sample, which consists of a series of rigid copper disks of varying diameter on top of a soft PDMS substrate. Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2017-08-01","The student, Sihan Chen, accepted the attached license on 2015-07-20 at 12:25.","The student, Sihan Chen, submitted this Thesis for approval on 2015-07-20 at 12:30.","This Thesis was approved for publication on 2015-07-20 at 15:06.","DSpace SAF Submission Ingestion Package generated from Vireo submission #8564 on 2019-08-22 at 16:17:27","Made available in DSpace on 2019-08-23T20:48:28Z (GMT). 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All rights reserved."],"dc:subject":["contact stiffness","AFM","calibration"],"dc:title":["Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM"],"dc:type":["text"],"thesis:degree_discipline":["Mechanical Engineering"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:24:44Z"}