{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/101339"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/101339","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Design, fabrication, and characterization of lithium niobate whispering-gallery-mode microdisk and microring resonators and grating couplers","abstract":"Lithium niobate (LiNbO3) is becoming popular in microelectronics and photonics research due to its exciting physical properties. Properties such as large electro-optic and piezoelectric coefficients make lithium niobate an excellent material for RF-photonics platforms that require center frequency tuning and large bandwidth for modulation. Photonic microresonators developed in LiNbO3 thin-films serve as the basic design unit of such platforms. This thesis provides preliminary characterizations of LiNbO3 whispering-gallery-mode microring and microdisk resonators, a single-ring filter, and grating couplers. The theory, simulation, fabrication, and experimental results of these devices are presented. Fabricated grating couplers with center wavelengths around 1560 nm are characterized and their insertion losses are explained. Microring and microdisk resonators with quality factors of 3-4 × 104 and a microring wavelength-dropping filter with a quality factor of 6.8 × 103 are demonstrated. Finally, the challenges in LiNbO3 micromachining and testing are discussed and future work for this research is suggested.","abstract_html":"Lithium niobate (LiNbO3) is becoming popular in microelectronics and photonics research due to its exciting physical properties. Properties such as large electro-optic and piezoelectric coefficients make lithium niobate an excellent material for RF-photonics platforms that require center frequency tuning and large bandwidth for modulation. Photonic microresonators developed in LiNbO3 thin-films serve as the basic design unit of such platforms. This thesis provides preliminary characterizations of LiNbO3 whispering-gallery-mode microring and microdisk resonators, a single-ring filter, and grating couplers. The theory, simulation, fabrication, and experimental results of these devices are presented. Fabricated grating couplers with center wavelengths around 1560 nm are characterized and their insertion losses are explained. Microring and microdisk resonators with quality factors of 3-4 × 104 and a microring wavelength-dropping filter with a quality factor of 6.8 × 103 are demonstrated. Finally, the challenges in LiNbO3 micromachining and testing are discussed and future work for this research is suggested.","abstract_has_math":false,"creators":["Kar, Arunita"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":["Gong, Songbin","Goddard, Lynford"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2018,"date_issued":"2018-09-04T20:47:20Z","date_published":"2018-09-04T20:47:20Z","updated_at":"2026-07-22T22:24:38Z","subjects":["Lithium niobate","resonator","grating coupler"],"languages":["en"],"rights":["Copyright 2018 Arunita Kar"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/101339","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Gong, Songbin","Goddard, Lynford"]},{"key":"dc:creator","label":"Author","values":["Kar, Arunita"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2018-09-04T20:47:20Z","2020-09-05T09:15:26Z","2018-04-19","2018-05"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Lithium niobate","resonator","grating coupler"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2018 Arunita Kar"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/101339"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Lithium niobate (LiNbO3) is becoming popular in microelectronics and photonics research due to its exciting physical properties. Properties such as large electro-optic and piezoelectric coefficients make lithium niobate an excellent material for RF-photonics platforms that require center frequency tuning and large bandwidth for modulation. Photonic microresonators developed in LiNbO3 thin-films serve as the basic design unit of such platforms. This thesis provides preliminary characterizations of LiNbO3 whispering-gallery-mode microring and microdisk resonators, a single-ring filter, and grating couplers. The theory, simulation, fabrication, and experimental results of these devices are presented. Fabricated grating couplers with center wavelengths around 1560 nm are characterized and their insertion losses are explained. Microring and microdisk resonators with quality factors of 3-4 × 104 and a microring wavelength-dropping filter with a quality factor of 6.8 × 103 are demonstrated. Finally, the challenges in LiNbO3 micromachining and testing are discussed and future work for this research is suggested.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2020-05-01","The student, Arunita Kar, accepted the attached license on 2018-04-17 at 15:27.","The student, Arunita Kar, submitted this Thesis for approval on 2018-04-17 at 15:37.","This Thesis was approved for publication on 2018-04-19 at 08:40.","DSpace SAF Submission Ingestion Package generated from Vireo submission #12322 on 2018-08-31 at 17:29:32","Made available in DSpace on 2018-09-04T20:47:20Z (GMT). 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Properties such as large electro-optic and piezoelectric coefficients make lithium niobate an excellent material for RF-photonics platforms that require center frequency tuning and large bandwidth for modulation. Photonic microresonators developed in LiNbO3 thin-films serve as the basic design unit of such platforms. This thesis provides preliminary characterizations of LiNbO3 whispering-gallery-mode microring and microdisk resonators, a single-ring filter, and grating couplers. The theory, simulation, fabrication, and experimental results of these devices are presented. Fabricated grating couplers with center wavelengths around 1560 nm are characterized and their insertion losses are explained. Microring and microdisk resonators with quality factors of 3-4 × 104 and a microring wavelength-dropping filter with a quality factor of 6.8 × 103 are demonstrated. Finally, the challenges in LiNbO3 micromachining and testing are discussed and future work for this research is suggested.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2020-05-01","The student, Arunita Kar, accepted the attached license on 2018-04-17 at 15:27.","The student, Arunita Kar, submitted this Thesis for approval on 2018-04-17 at 15:37.","This Thesis was approved for publication on 2018-04-19 at 08:40.","DSpace SAF Submission Ingestion Package generated from Vireo submission #12322 on 2018-08-31 at 17:29:32","Made available in DSpace on 2018-09-04T20:47:20Z (GMT). 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