{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/101088"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/101088","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Development of a single-stage nano indenter","abstract":"The current work seeks to understand the functionality of a single degree-of-freedom stage in a MEMS (Micro-Electromechanical system) platform that enables very precise displacement as well as force control. This type of stage finds use in determining fluid properties such as viscosity; to determine the strength and rigidity of carbon nanotubes (CNTs) and monolayers of graphene and for mechano-transduction in cellular mechanics and extracellular matrix. The current design is shown to produce a displacement of 39 μm and is capable of applying a theoretical maximum force of 260 μN. The study explores in detail the testing and analysis of the device without delving into great detail about the initial design and fabrication of the device itself. Much work was done to properly interface this MEMS device to the external world using connectors and a signal processing circuit in a custom-built PCB for improved noise reduction and enhanced signal strength. A capacitance-to-digital converter (CDC) IC, AD7747 is used for reading the capacitance signals from the MEMS device. The AD7747 uses I2C communication protocol and Arduino ATmega 2560 was used to read the data generated by the IC. Moreover, image processing techniques were employed to track displacements down to 1 μm. The data from the image processing analysis along with data from AD7747 was used to characterize the devices for change in capacitance and displacement with respect to applied DC voltage.","abstract_html":"The current work seeks to understand the functionality of a single degree-of-freedom stage in a MEMS (Micro-Electromechanical system) platform that enables very precise displacement as well as force control. This type of stage finds use in determining fluid properties such as viscosity; to determine the strength and rigidity of carbon nanotubes (CNTs) and monolayers of graphene and for mechano-transduction in cellular mechanics and extracellular matrix. The current design is shown to produce a displacement of 39 μm and is capable of applying a theoretical maximum force of 260 μN. The study explores in detail the testing and analysis of the device without delving into great detail about the initial design and fabrication of the device itself. Much work was done to properly interface this MEMS device to the external world using connectors and a signal processing circuit in a custom-built PCB for improved noise reduction and enhanced signal strength. A capacitance-to-digital converter (CDC) IC, AD7747 is used for reading the capacitance signals from the MEMS device. The AD7747 uses I2C communication protocol and Arduino ATmega 2560 was used to read the data generated by the IC. Moreover, image processing techniques were employed to track displacements down to 1 μm. The data from the image processing analysis along with data from AD7747 was used to characterize the devices for change in capacitance and displacement with respect to applied DC voltage.","abstract_has_math":false,"creators":["Charles Fernandes, Allen Gabriel"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Ferreira, Placid M."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2018,"date_issued":"2018-09-04T20:32:01Z","date_published":"2018-09-04T20:32:01Z","updated_at":"2026-07-22T22:24:38Z","subjects":["MEMS stage, Comb drive"],"languages":["en"],"rights":["Copyright 2018 Allen Gabriel Charles Fernandes"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/101088","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Ferreira, Placid M."]},{"key":"dc:creator","label":"Author","values":["Charles Fernandes, Allen Gabriel"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2018-09-04T20:32:01Z","2018-04-26","2018-05"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["MEMS stage, Comb drive"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2018 Allen Gabriel Charles Fernandes"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/101088"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["The current work seeks to understand the functionality of a single degree-of-freedom stage in a MEMS (Micro-Electromechanical system) platform that enables very precise displacement as well as force control. This type of stage finds use in determining fluid properties such as viscosity; to determine the strength and rigidity of carbon nanotubes (CNTs) and monolayers of graphene and for mechano-transduction in cellular mechanics and extracellular matrix. The current design is shown to produce a displacement of 39 μm and is capable of applying a theoretical maximum force of 260 μN. The study explores in detail the testing and analysis of the device without delving into great detail about the initial design and fabrication of the device itself. Much work was done to properly interface this MEMS device to the external world using connectors and a signal processing circuit in a custom-built PCB for improved noise reduction and enhanced signal strength. A capacitance-to-digital converter (CDC) IC, AD7747 is used for reading the capacitance signals from the MEMS device. The AD7747 uses I2C communication protocol and Arduino ATmega 2560 was used to read the data generated by the IC. Moreover, image processing techniques were employed to track displacements down to 1 μm. The data from the image processing analysis along with data from AD7747 was used to characterize the devices for change in capacitance and displacement with respect to applied DC voltage.","Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2018-08-31 without embargo terms","The student, Allen Gabriel Charles Fernandes, accepted the attached license on 2018-04-25 at 22:07.","The student, Allen Gabriel Charles Fernandes, submitted this Thesis for approval on 2018-04-25 at 22:24.","This Thesis was approved for publication on 2018-04-26 at 16:25.","DSpace SAF Submission Ingestion Package generated from Vireo submission #12511 on 2018-08-31 at 17:15:07","Made available in DSpace on 2018-09-04T20:32:01Z (GMT). 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This type of stage finds use in determining fluid properties such as viscosity; to determine the strength and rigidity of carbon nanotubes (CNTs) and monolayers of graphene and for mechano-transduction in cellular mechanics and extracellular matrix. The current design is shown to produce a displacement of 39 μm and is capable of applying a theoretical maximum force of 260 μN. The study explores in detail the testing and analysis of the device without delving into great detail about the initial design and fabrication of the device itself. Much work was done to properly interface this MEMS device to the external world using connectors and a signal processing circuit in a custom-built PCB for improved noise reduction and enhanced signal strength. A capacitance-to-digital converter (CDC) IC, AD7747 is used for reading the capacitance signals from the MEMS device. The AD7747 uses I2C communication protocol and Arduino ATmega 2560 was used to read the data generated by the IC. Moreover, image processing techniques were employed to track displacements down to 1 μm. The data from the image processing analysis along with data from AD7747 was used to characterize the devices for change in capacitance and displacement with respect to applied DC voltage.","Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2018-08-31 without embargo terms","The student, Allen Gabriel Charles Fernandes, accepted the attached license on 2018-04-25 at 22:07.","The student, Allen Gabriel Charles Fernandes, submitted this Thesis for approval on 2018-04-25 at 22:24.","This Thesis was approved for publication on 2018-04-26 at 16:25.","DSpace SAF Submission Ingestion Package generated from Vireo submission #12511 on 2018-08-31 at 17:15:07","Made available in DSpace on 2018-09-04T20:32:01Z (GMT). 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