{"id":{"repo_id":"ucf","oai_identifier":"oai:stars.library.ucf.edu:etd-1692"},"canonical_url":"https://search.dev.ndltd.org/etd/ucf/oai:stars.library.ucf.edu:etd-1692","repository":{"repo_id":"ucf","name":"Central Florida","base_url":"https://stars.library.ucf.edu/do/oai/"},"display":{"title":"Reactive Sputter Deposition of Lithium Phosphorus Oxynitride Thin Films, A Li Battery Solid State Electrolyte","abstract":"Lithium phosphorus oxy-nitride (LiPON) thin films are widely studied and used as a thin film electrolyte for lithium ion battery applications. LiPON thin films may be prepared by many techniques, but RF sputter deposition is most frequently used and was investigated in this dissertation, in spite of its low deposition rate, because of it offers more reliable and controllable processing. This dissertation includes the methodologies of sputter deposition and materials characterization of the LiPON thin film electrolytes. The LiPON thin films were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied. The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization.","abstract_html":"Lithium phosphorus oxy-nitride (LiPON) thin films are widely studied and used as a thin film electrolyte for lithium ion battery applications. LiPON thin films may be prepared by many techniques, but RF sputter deposition is most frequently used and was investigated in this dissertation, in spite of its low deposition rate, because of it offers more reliable and controllable processing. This dissertation includes the methodologies of sputter deposition and materials characterization of the LiPON thin film electrolytes. The LiPON thin films were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied. The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization.","abstract_has_math":false,"creators":["Mani, Prabhu Doss"],"institution":null,"degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":null,"school":null,"contributors":["Coffey, Kevin"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-01-01T08:00:00Z","date_published":"2015-01-01T08:00:00Z","updated_at":"2026-07-24T05:09:09Z","subjects":["Lipon; ionic conductivity; deposition temperature; substrate bias; xps; icp/oes","Engineering","Dissertations, Academic -- Engineering and Computer Science; Engineering and Computer Science -- Dissertations, Academic"],"languages":["English"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["CFE0005835"],"render_values":[{"text":"CFE0005835","href":null,"code":true}]}]},"links":{"outbound_url":"https://stars.library.ucf.edu/etd/693","outbound_label":"Repository record","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Coffey, Kevin"]},{"key":"dc:creator","label":"Author","values":["Mani, Prabhu Doss"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:type","label":"Dc Type","values":["Doctoral Dissertation (Open Access)"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Lipon; ionic conductivity; deposition temperature; substrate bias; xps; icp/oes","Engineering","Dissertations, Academic -- Engineering and Computer Science; Engineering and Computer Science -- Dissertations, Academic"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["English"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["CFE0005835"]},{"key":"dc:identifier.uri","label":"Identifier URI","values":["https://stars.library.ucf.edu/etd/693"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["<p>If this is your thesis or dissertation, and want to learn how to access it or for more information about readership statistics, contact us at <a href=\"mailto:STARS@ucf.edu\">STARS@ucf.edu</a></p>","Doctor of Philosophy (Ph.D.)","College of Engineering and Computer Science","Materials Science Engineering","Engineering and Computer Science"]},{"key":"dc:description.abstract","label":"Abstract","values":["Lithium phosphorus oxy-nitride (LiPON) thin films are widely studied and used as a thin film electrolyte for lithium ion battery applications. LiPON thin films may be prepared by many techniques, but RF sputter deposition is most frequently used and was investigated in this dissertation, in spite of its low deposition rate, because of it offers more reliable and controllable processing. This dissertation includes the methodologies of sputter deposition and materials characterization of the LiPON thin film electrolytes. The LiPON thin films were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied. The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Reactive Sputter Deposition of Lithium Phosphorus Oxynitride Thin Films, A Li Battery Solid State Electrolyte"]}]}],"canonical_facts":{"dc:contributor":["Coffey, Kevin"],"dc:creator":["Mani, Prabhu Doss"],"dc:description":["<p>If this is your thesis or dissertation, and want to learn how to access it or for more information about readership statistics, contact us at <a href=\"mailto:STARS@ucf.edu\">STARS@ucf.edu</a></p>","Doctor of Philosophy (Ph.D.)","College of Engineering and Computer Science","Materials Science Engineering","Engineering and Computer Science"],"dc:description.abstract":["Lithium phosphorus oxy-nitride (LiPON) thin films are widely studied and used as a thin film electrolyte for lithium ion battery applications. LiPON thin films may be prepared by many techniques, but RF sputter deposition is most frequently used and was investigated in this dissertation, in spite of its low deposition rate, because of it offers more reliable and controllable processing. This dissertation includes the methodologies of sputter deposition and materials characterization of the LiPON thin film electrolytes. The LiPON thin films were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied. The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization."],"dc:format":["application/pdf"],"dc:identifier":["CFE0005835"],"dc:identifier.uri":["https://stars.library.ucf.edu/etd/693"],"dc:language":["English"],"dc:subject":["Lipon; ionic conductivity; deposition temperature; substrate bias; xps; icp/oes","Engineering","Dissertations, Academic -- Engineering and Computer Science; Engineering and Computer Science -- Dissertations, Academic"],"dc:title":["Reactive Sputter Deposition of Lithium Phosphorus Oxynitride Thin Films, A Li Battery Solid State Electrolyte"],"dc:type":["Doctoral Dissertation (Open Access)"]},"updated_at":"2026-07-24T05:09:09Z"}