Methods to achieve wavelength selectivity in infrared microbolometers and reduced thermal mass microbolometers

The use of a patterned resistive sheet as an infrared-selective absorber, including the effects of a mechanical support dielectric layer is discussed. Also, modified dielectric coated Salisbury Screen can improve both the wavelength selectivity and the speed of thermal response for microbolometers. These patterned resistive sheets and Modified dielectric coated Salisbury Screen are a modified form of classical Salisbury Screens that utilize a resistive absorber layer placed a quarter-wavelength in front of a mirror. These structures can show a narrower detection bandwidth when compared to conventional microbolometers. For a Modified dielectric coated Salisbury Screen for multi-spectral system, wavelength selectivity can be varied by changing the distance to the mirror, and for patterned resistive sheet, wavelength selectivity can be varied by changing the lithographically drawn parameters of the array. Hence, different pixels in a focal plane array can be designed to produce a “multi-color” infrared imaging system. Also, the thermal mass of microbolometer is reduced using patterned resistive structure.

Name thesis:degree_name

Doctor of Philosophy

Level thesis:degree_level

Doctoral

Discipline thesis:degree_discipline

Electrical and Computer Engineering

Grantor

University of Texas at Austin

Year dc:date.issued

2010

Author dc:creator

• Jung, Joo-Yun, 1976-

Advisor dc:contributor.advisor

• Neikirk, Dean P., 1957-

Committee members dc:contributor.committeemember

• Bank, Seth
• Belkin, Mikhail
• Hall, Neal
• Rogers, Robert L.

• Microbolometer
• Frequency-selective absorber
• Metamaterials
• MEMS
• Patterned resistive sheet
• Salisbury Screens

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/2152/ETD-UT-2010-12-2088

OAI identifier oai:identifier

oai:repositories.lib.utexas.edu:2152/ETD-UT-2010-12-2088