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Rochester Institute of Technology

Image-based EUVL Aberration Metrology

dc:creator Fenger, Germain Louis

thesis:degree_name Microsystems Engineering (Ph.D.)

Degree

thesis:*

Name thesis:degree_name: Microsystems Engineering (Ph.D.)
Level thesis:degree_level: Dissertation

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Fenger, Germain Louis
Contributors dc:contributor: Bruce W. Smith

Subjects

dc:subject × 1

None provided

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/8488
OAI identifier oai:identifier: oai:repository.rit.edu:theses-9511

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

citation

Fenger, Germain Louis. Image-based EUVL Aberration Metrology. Dissertation thesis, https://repository.rit.edu/theses/8488

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