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Rochester Institute of Technology

Optical properties of materials for 157 nm lithography

dc:creator Bourov, Anatoly

Degree

thesis:*

Level thesis:degree_level: Thesis

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Bourov, Anatoly
Contributors dc:contributor: Bruce W. Smith

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/8382
OAI identifier oai:identifier: oai:repository.rit.edu:theses-9402

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

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Thesis

citation

Bourov, Anatoly. Optical properties of materials for 157 nm lithography. Thesis thesis, https://repository.rit.edu/theses/8382

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