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Rochester Institute of Technology
New approaches in optical lithography technology for subwavelength resolution
Degree
thesis:*- Name thesis:degree_name
- Imaging Science (Ph.D.)
- Level thesis:degree_level
- Dissertation
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Kang, Hoyoung
- Contributors dc:contributor
-
- Bruce W. Smith
Identifiers
dc:identifier.*- Repository record dc:identifier
- https://repository.rit.edu/theses/8078
- OAI identifier oai:identifier
- oai:repository.rit.edu:theses-9083