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Rochester Institute of Technology

Manufacturing Design and Fabrication of 100 nm (Leff) CMOS Devices

dc:creator Parikh, Samarth

thesis:degree_name Microelectronic Engineering (MS)

Degree

thesis:*

Name thesis:degree_name: Microelectronic Engineering (MS)
Level thesis:degree_level: Thesis

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Parikh, Samarth
Contributors dc:contributor: Lynn F. Fuller

Subjects

dc:subject × 6

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/7948
OAI identifier oai:identifier: oai:repository.rit.edu:theses-9027

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

citation

Parikh, Samarth. Manufacturing Design and Fabrication of 100 nm (Leff) CMOS Devices. Thesis thesis, https://repository.rit.edu/theses/7948

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