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Rochester Institute of Technology

Al2O3 hosted attenuated phase shift mask materials for 157 nm

dc:creator Liu, Yang

thesis:degree_name Materials Science and Engineering (MS)

Degree

thesis:*

Name thesis:degree_name: Materials Science and Engineering (MS)
Level thesis:degree_level: Thesis

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Liu, Yang
Contributors dc:contributor: Bruce Smith

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/7623
OAI identifier oai:identifier: oai:repository.rit.edu:theses-8628

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

rit
Thesis

citation

Liu, Yang. Al2O3 hosted attenuated phase shift mask materials for 157 nm. Thesis thesis, https://repository.rit.edu/theses/7623

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