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Rochester Institute of Technology

Measuring aberrations in lithographic projection systems with phase wheel targets

dc:creator Zavyalova, Lena

Degree

thesis:*
Level thesis:degree_level
Dissertation

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Zavyalova, Lena
Contributors dc:contributor
  • Smith, Bruce

Subjects

dc:subject × 4

Identifiers

dc:identifier.*
Repository record dc:identifier
https://repository.rit.edu/theses/3014
OAI identifier oai:identifier
oai:repository.rit.edu:theses-4018

Chain of custody

source
Harvested from
Rochester Institute of Technology
Base URL
repository.rit.edu/do/oai/
Last updated
2026-07-27
Source record
OAI-PMH GetRecord
related terms
citation

Zavyalova, Lena. Measuring aberrations in lithographic projection systems with phase wheel targets. Dissertation thesis, https://repository.rit.edu/theses/3014

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