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Rice University

Electrical characterizations of lithium niobate thin films in a metal-ferroelectric-semiconductor capacitor

Abstract

dc:description.abstract

A LiNbO3 thin film Metal-Ferroelectric-Semiconductor capacitor is analyzed with various electrical characterization methods for studying the polarization switching and the thin film conduction behavior. The polarization density vs. electric field (P-E) curve shows that the remnant polarization is 16.85muC/cm2 and the coercive field is 117.25 KV/cm when maximum applied field is 286.2KV/cm for a sinusoidal input waveform. The capacitance vs. voltage bias (C-V) curve further demonstrates that the polarization charge is the dominant charge in controlling the ferroelectric semiconductor interface property. The switching transient current curve from a dual polarity four pulses chain study (P-S) gives the switching time of the sample about 80--100ns. Current vs. voltage (I--V) curve is explained with a back-to-back Schottky barrier controlled conduction mechanism. These electrical characterization results demonstrate that LiNbO3 is a promising candidate for a Metal-Ferroelectric-Semiconductor-Field-Effect-Transistor (MFSFET) non-volatile non-destructive memory application.

Degree

thesis:*
Name thesis:degree_name
Master of Science
Level thesis:degree_level
Masters
Discipline thesis:degree_discipline
Engineering
Grantor
Rice University
Year dc:date.issued
2002

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Wang, Xuguang
Advisor dc:contributor.advisor
  • Rabson, Thomas A.

Subjects

dc:subject × 2

Rights

dc:rights
Statement dc:rights
  • Copyright is held by the author, unless otherwise indicated. Permission to reuse, publish, or reproduce the work beyond the bounds of fair use or other exemptions to copyright law must be obtained from the copyright holder.
Language dc:language.iso
eng

Identifiers

dc:identifier.*
Handle dc:identifier.uri
https://hdl.handle.net/1911/17559
OAI identifier oai:identifier
oai:repository.rice.edu:1911/17559

Chain of custody

source
Harvested from
Rice University
Base URL
repository.rice.edu/server/oai/request
Last updated
2026-07-24
Source record
OAI-PMH GetRecord
citation

Wang, Xuguang. Electrical characterizations of lithium niobate thin films in a metal-ferroelectric-semiconductor capacitor. Masters thesis, Rice University, 2002. https://hdl.handle.net/1911/17559