QUANTIFICATION OF LOW ENERGY X-RAY DETECTION IN EDS DETECTORS
type: CreativeWork
description: A new approach to characterize low energy performance of energy dispersive spectroscopy (EDS) detectors for application in scanning electron microscopy is proposed. In this approach an empirical parameter is computed from the x-ray spectra. This parameter represents absorption of lower energy x-rays by the EDS detector and depends on electron beam conditions and the specimen-detector configuration in the scanning electron microscope. The ease of computation of this empirical parameter and its sensitivity to detector specifications enable the use of this parameter as an evaluation tool for various EDS detectors.
abstract: A new approach to characterize low energy performance of energy dispersive spectroscopy (EDS) detectors for application in scanning electron microscopy is proposed. In this approach an empirical parameter is computed from the x-ray spectra. This parameter represents absorption of lower energy x-rays by the EDS detector and depends on electron beam conditions and the specimen-detector configuration in the scanning electron microscope. The ease of computation of this empirical parameter and its sensitivity to detector specifications enable the use of this parameter as an evaluation tool for various EDS detectors.
author: AARTHY RAMAKRISHNAN
keywords: scanning electron microscope, energy dispersive spectroscopy, x-rays, Si(Li) detectors, x-ray absorption, detector efficiency
date published: 1997
date modified: 2026-07-24T03:31:38Z
provider: National University of Singapore
publisher: Networked Digital Library of Theses and Dissertations
type: WebPage
source organization: National University of Singapore