{"id":{"repo_id":"nus","oai_identifier":"oai:scholarbank.nus.edu.sg:10635/161037"},"canonical_url":"https://search.dev.ndltd.org/etd/nus/oai:scholarbank.nus.edu.sg:10635/161037","repository":{"repo_id":"nus","name":"National University of Singapore","base_url":"https://scholarbank.nus.edu.sg/oai/request"},"display":{"title":"Image formation using geometrical theory of diffraction and its applications to lithography","abstract":"<P>PROPAGATING DIFFRACTED RAYS POSTULATED IN GEOMETRICAL THEORY OF DIFFRACTION THROUGH</P><P>THE OPTICAL SYSTEM AND COLLECTING THEM IN IMAGE SPACE, IT IS DISCOVERED THAT, IF THE</P><P>DIFFRACTED RAY FIELDS ARE SAMPLED ABOUT THE PENUMBRA REGIONS ABOVE SOME THRESHOLD</P><P>VALUE, 1D AND 2D IMAGE DISTURBANCES CAN BE CONSTRUCTED ENTIRELY FROM EDGE AND</P><P>VERTEX RAY CONTRIBUTIONS, RESPECTIVELY. BY REARRANGING THE MATHEMATICAL FORMULATION,</P><P>2D IMAGE DISTURBANCE CAN BE CONSTRUCTED FROM EDGE CONTRIBUTIONS AS WELL.</P><P>USING THE EDGE-BASED MODEL, WE DISCOVERED THAT IMAGING BEHAVIOR IS GOVERNED BY</P><P>A CHARACTERISTIC LENGTH. AND USING THE VERTEX-BASED MODEL, THE AMOUNT OF PREDISTORTION</P><P>NEEDED FOR OPTICAL PROXIMITY CORRECTION CAN BE SOLVED FROM A SYSTEM OF</P><P>LINEAR EQUATIONS. THE IMAGE DISTURBANCE OF 1D NON-PLANAR MASK OBJECT CAN BE OBTAINED</P><P>SIMILARLY. COMPARED WITH EXISTING METHODOLOGY WHERE THE EFFECTIVE OBJECT</P><P>FIELD IS PRE-CALCULATED USING A RIGOROUS ALGORITH","abstract_html":"&lt;P&gt;PROPAGATING DIFFRACTED RAYS POSTULATED IN GEOMETRICAL THEORY OF DIFFRACTION THROUGH&lt;/P&gt;&lt;P&gt;THE OPTICAL SYSTEM AND COLLECTING THEM IN IMAGE SPACE, IT IS DISCOVERED THAT, IF THE&lt;/P&gt;&lt;P&gt;DIFFRACTED RAY FIELDS ARE SAMPLED ABOUT THE PENUMBRA REGIONS ABOVE SOME THRESHOLD&lt;/P&gt;&lt;P&gt;VALUE, 1D AND 2D IMAGE DISTURBANCES CAN BE CONSTRUCTED ENTIRELY FROM EDGE AND&lt;/P&gt;&lt;P&gt;VERTEX RAY CONTRIBUTIONS, RESPECTIVELY. BY REARRANGING THE MATHEMATICAL FORMULATION,&lt;/P&gt;&lt;P&gt;2D IMAGE DISTURBANCE CAN BE CONSTRUCTED FROM EDGE CONTRIBUTIONS AS WELL.&lt;/P&gt;&lt;P&gt;USING THE EDGE-BASED MODEL, WE DISCOVERED THAT IMAGING BEHAVIOR IS GOVERNED BY&lt;/P&gt;&lt;P&gt;A CHARACTERISTIC LENGTH. AND USING THE VERTEX-BASED MODEL, THE AMOUNT OF PREDISTORTION&lt;/P&gt;&lt;P&gt;NEEDED FOR OPTICAL PROXIMITY CORRECTION CAN BE SOLVED FROM A SYSTEM OF&lt;/P&gt;&lt;P&gt;LINEAR EQUATIONS. THE IMAGE DISTURBANCE OF 1D NON-PLANAR MASK OBJECT CAN BE OBTAINED&lt;/P&gt;&lt;P&gt;SIMILARLY. COMPARED WITH EXISTING METHODOLOGY WHERE THE EFFECTIVE OBJECT&lt;/P&gt;&lt;P&gt;FIELD IS PRE-CALCULATED USING A RIGOROUS ALGORITH","abstract_has_math":false,"creators":["KHOH KER CHING, ANDREW"],"institution":null,"degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":null,"school":null,"contributors":[],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2005,"date_issued":"2005-06-02","date_published":"2005-06-02","updated_at":"2026-07-24T03:31:26Z","subjects":["image formation theory, geometrical theory of diffraction, lithography, optical proximity correction, simulation"],"languages":[],"rights":[],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":null,"outbound_label":null,"outbound_source":null},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:creator","label":"Author","values":["KHOH KER CHING, ANDREW"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.issued","label":"Date","values":["2005-06-02"]},{"key":"dc:relation.isreferencedby","label":"Dc Relation Isreferencedby","values":["https://scholarbank.nus.edu.sg/handle/10635/161037"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["image formation theory, geometrical theory of diffraction, lithography, optical proximity correction, simulation"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.uri","label":"Identifier URI","values":["https://scholarbank.nus.edu.sg/bitstreams/0d060cb4-426b-476f-8749-0cc3828023ec/download"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["<P>PROPAGATING DIFFRACTED RAYS POSTULATED IN GEOMETRICAL THEORY OF DIFFRACTION THROUGH</P><P>THE OPTICAL SYSTEM AND COLLECTING THEM IN IMAGE SPACE, IT IS DISCOVERED THAT, IF THE</P><P>DIFFRACTED RAY FIELDS ARE SAMPLED ABOUT THE PENUMBRA REGIONS ABOVE SOME THRESHOLD</P><P>VALUE, 1D AND 2D IMAGE DISTURBANCES CAN BE CONSTRUCTED ENTIRELY FROM EDGE AND</P><P>VERTEX RAY CONTRIBUTIONS, RESPECTIVELY. BY REARRANGING THE MATHEMATICAL FORMULATION,</P><P>2D IMAGE DISTURBANCE CAN BE CONSTRUCTED FROM EDGE CONTRIBUTIONS AS WELL.</P><P>USING THE EDGE-BASED MODEL, WE DISCOVERED THAT IMAGING BEHAVIOR IS GOVERNED BY</P><P>A CHARACTERISTIC LENGTH. AND USING THE VERTEX-BASED MODEL, THE AMOUNT OF PREDISTORTION</P><P>NEEDED FOR OPTICAL PROXIMITY CORRECTION CAN BE SOLVED FROM A SYSTEM OF</P><P>LINEAR EQUATIONS. THE IMAGE DISTURBANCE OF 1D NON-PLANAR MASK OBJECT CAN BE OBTAINED</P><P>SIMILARLY. COMPARED WITH EXISTING METHODOLOGY WHERE THE EFFECTIVE OBJECT</P><P>FIELD IS PRE-CALCULATED USING A RIGOROUS ALGORITH"]},{"key":"dc:format.checksum.md5","label":"Dc Format Checksum Md5","values":["06dff7b8a9133a09015f529f26469fbc","52d4372cd98860959f0696baa7d2c7f3"]},{"key":"dc:title","label":"Title","values":["Image formation using geometrical theory of diffraction and its applications to lithography"]}]}],"canonical_facts":{"dc:creator":["KHOH KER CHING, ANDREW"],"dc:date.issued":["2005-06-02"],"dc:description.abstract":["<P>PROPAGATING DIFFRACTED RAYS POSTULATED IN GEOMETRICAL THEORY OF DIFFRACTION THROUGH</P><P>THE OPTICAL SYSTEM AND COLLECTING THEM IN IMAGE SPACE, IT IS DISCOVERED THAT, IF THE</P><P>DIFFRACTED RAY FIELDS ARE SAMPLED ABOUT THE PENUMBRA REGIONS ABOVE SOME THRESHOLD</P><P>VALUE, 1D AND 2D IMAGE DISTURBANCES CAN BE CONSTRUCTED ENTIRELY FROM EDGE AND</P><P>VERTEX RAY CONTRIBUTIONS, RESPECTIVELY. BY REARRANGING THE MATHEMATICAL FORMULATION,</P><P>2D IMAGE DISTURBANCE CAN BE CONSTRUCTED FROM EDGE CONTRIBUTIONS AS WELL.</P><P>USING THE EDGE-BASED MODEL, WE DISCOVERED THAT IMAGING BEHAVIOR IS GOVERNED BY</P><P>A CHARACTERISTIC LENGTH. AND USING THE VERTEX-BASED MODEL, THE AMOUNT OF PREDISTORTION</P><P>NEEDED FOR OPTICAL PROXIMITY CORRECTION CAN BE SOLVED FROM A SYSTEM OF</P><P>LINEAR EQUATIONS. THE IMAGE DISTURBANCE OF 1D NON-PLANAR MASK OBJECT CAN BE OBTAINED</P><P>SIMILARLY. 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