Microstruture & High Frequency Property of Fe- & Co- Based Nano-Grain Thin Films

Magnetic thin films are widely used in various fields of high-speed electronics and microwave devices. In order to apply magnetic thin films at high frequency range, it is essential to measure the high frequency permeability and understand the electromagnetic properties that can control the high frequency permeability. In this research, the permeability measurement method at high frequency for soft magnetic thin films was investigated; some Fe- and Co-based magnetic thin films deposited by rf magnetron sputtering were fabricated, and their microstructure, magnetic properties, electrical resistivity, and high frequency permeability were characterized. Thin films with high value of permeability are achieved with resonant frequency tunable from 0.45 to 2.99 GHz.

Author dc:creator

• LIU YAN

• magnetic films, granular films, high frequency, permeability, nanostructure