PROTON BEAM WRITING OF MICRO/NANO FLUIDIC DEVICES FOR DNA ANALYSIS AND PARTICLE SEPARATION

The fabrication of micro/nano fluidic devices has been an emerging field of research in recent years. A growing number of applications are found in biology, chemistry and medicine. Polymer materials like polydimethylsiloxane (PDMS) through soft lithography, polymethylmethacrylate (PMMA) are very popular for micro/nanofludic fabrication because of the easy process and low cost. In this thesis, different types of molds (resist, OrmoStamp and nickel mold) were fabricated for PDMS and PMMA fluidic devices molding through proton beam writing (PBW). The fluidic devices were further used for the study of DNA configuration using a nanochannel confinement and particle separation using a ratchet structure. PBW is a direct write technique can be focused down to sub 30 nm size. Proton beam can penetrate a photoresist very deep with minimal proximity effects allow us to fabricate 3D high aspect ratio molds.

Author dc:creator

• LIU FAN

• proton beem writing, micro/nano fludics,DNA anlysis, particle separation, PDMS, PMMA