{"id":{"repo_id":"mo-state","oai_identifier":"oai:bearworks.missouristate.edu:theses-1851"},"canonical_url":"https://search.dev.ndltd.org/etd/mo-state/oai:bearworks.missouristate.edu:theses-1851","repository":{"repo_id":"mo-state","name":"Missouri State University","base_url":"https://bearworks.missouristate.edu/do/oai/"},"display":{"title":"Use of Ion Implantation in the Construction of an Uncooled Microbolometer","abstract":"Uncooled infrared (IR) bolometers have been constructed using a sensor bridge made of an electrically conductive polymer attached to a quartz substrate. The bridge is mounted on two sides and crosses an etched trough in the underlying substrate. Current is supplied to the bridge by means of two contacts on either attached end. The bridge material is made conductive through implantation of 1x10¹⁶ N⁺ ions/cm². The use of ion implanted polymers in building the IR sensor allows several advantages over the use of more conventional materials. The implanted polymers are very resistant to corrosive materials, and therefore do not change resistance when exposed to solvents used in processing. This allows spin coating, exposure and patterning of photoresist, and etching of the separation layers beneath the polymer bridge with no significant change in resistance. In addition, the relatively low mass of the polymer allows a reduction in the heat capacity of the bridge, leading to a greater temperature change per unit energy and therefore better detection qualities.","abstract_html":"Uncooled infrared (IR) bolometers have been constructed using a sensor bridge made of an electrically conductive polymer attached to a quartz substrate. The bridge is mounted on two sides and crosses an etched trough in the underlying substrate. Current is supplied to the bridge by means of two contacts on either attached end. The bridge material is made conductive through implantation of 1x10¹⁶ N⁺ ions/cm². The use of ion implanted polymers in building the IR sensor allows several advantages over the use of more conventional materials. The implanted polymers are very resistant to corrosive materials, and therefore do not change resistance when exposed to solvents used in processing. This allows spin coating, exposure and patterning of photoresist, and etching of the separation layers beneath the polymer bridge with no significant change in resistance. In addition, the relatively low mass of the polymer allows a reduction in the heat capacity of the bridge, leading to a greater temperature change per unit energy and therefore better detection qualities.","abstract_has_math":false,"creators":["Speer, Robert W."],"institution":null,"degree_name":"Master of Science in Materials Science","degree_level":"Masters","degree_discipline":"Physics, Astronomy, and Materials Science","degree_department":null,"school":null,"contributors":["Ryan Giedd"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":1999,"date_issued":"1999-12-01T08:00:00Z","date_published":"1999-12-01T08:00:00Z","updated_at":"2026-07-24T03:15:54Z","subjects":["Materials Science and Engineering"],"languages":[],"rights":["© Robert W Speer"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://bearworks.missouristate.edu/theses/850","outbound_label":"Repository record","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Ryan Giedd"]},{"key":"dc:creator","label":"Author","values":["Speer, Robert W."]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"thesis:degree_discipline","label":"Discipline","values":["Physics, Astronomy, and Materials Science"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Masters"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Master of Science in Materials Science"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Materials Science and Engineering"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:rights","label":"Dc Rights","values":["© Robert W Speer"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://bearworks.missouristate.edu/theses/850"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["Uncooled infrared (IR) bolometers have been constructed using a sensor bridge made of an electrically conductive polymer attached to a quartz substrate. The bridge is mounted on two sides and crosses an etched trough in the underlying substrate. Current is supplied to the bridge by means of two contacts on either attached end. The bridge material is made conductive through implantation of 1x10¹⁶ N⁺ ions/cm². The use of ion implanted polymers in building the IR sensor allows several advantages over the use of more conventional materials. The implanted polymers are very resistant to corrosive materials, and therefore do not change resistance when exposed to solvents used in processing. This allows spin coating, exposure and patterning of photoresist, and etching of the separation layers beneath the polymer bridge with no significant change in resistance. In addition, the relatively low mass of the polymer allows a reduction in the heat capacity of the bridge, leading to a greater temperature change per unit energy and therefore better detection qualities."]},{"key":"dc:title","label":"Title","values":["Use of Ion Implantation in the Construction of an Uncooled Microbolometer"]}]}],"canonical_facts":{"dc:contributor":["Ryan Giedd"],"dc:creator":["Speer, Robert W."],"dc:description.abstract":["Uncooled infrared (IR) bolometers have been constructed using a sensor bridge made of an electrically conductive polymer attached to a quartz substrate. The bridge is mounted on two sides and crosses an etched trough in the underlying substrate. Current is supplied to the bridge by means of two contacts on either attached end. The bridge material is made conductive through implantation of 1x10¹⁶ N⁺ ions/cm². The use of ion implanted polymers in building the IR sensor allows several advantages over the use of more conventional materials. The implanted polymers are very resistant to corrosive materials, and therefore do not change resistance when exposed to solvents used in processing. This allows spin coating, exposure and patterning of photoresist, and etching of the separation layers beneath the polymer bridge with no significant change in resistance. In addition, the relatively low mass of the polymer allows a reduction in the heat capacity of the bridge, leading to a greater temperature change per unit energy and therefore better detection qualities."],"dc:identifier":["https://bearworks.missouristate.edu/theses/850"],"dc:rights":["© Robert W Speer"],"dc:subject":["Materials Science and Engineering"],"dc:title":["Use of Ion Implantation in the Construction of an Uncooled Microbolometer"],"thesis:degree_discipline":["Physics, Astronomy, and Materials Science"],"thesis:degree_level":["Masters"],"thesis:degree_name":["Master of Science in Materials Science"]},"updated_at":"2026-07-24T03:15:54Z"}