Design and calibration of an infrared position sensor

An optical method for sensing lateral motion in silicon-based devices was developed and implemented. Using an infrared laser to illuminate the device and an InGaAs photodiode to detect the transmitted radiation, acquisition of the frequency component of motion has been demonstrated. A simple analysis of electromagnetic transmission through silicon was performed, along with an infrared characterization of pertinent materials. A lateral resonator was designed and fabricated to act as a calibration device for the optical position sensor. Using a coupled electro-mechanical solver, MEMCAD, the resonant modes were simulated and found to be in agreement with the analytical calculations. Upon completion of the device, it was found that motion was not optically detectable. Instead, an audible tone was heard when electrical stimulation was applied. The sound was analyzed and a first-order explanation was developed. Electrical testing and destructive examination of the resonator indicate that the device fabrication was not complete. Process developments and improvements to realize the desired design are discussed.

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Mechanical Engineering

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

1999

Author dc:creator

• Chen, Dye-Zone A. (Dye-Zone Abraham), 1973-

Advisor dc:contributor.advisor

• Martin A. Schmidt.

• Mechanical Engineering

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/9408

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/9408