Reduced-order modeling of MEMS using modal basis functions

The field of MEMS has matured significantly over the last two decades increasing in both complexity and level of integration. To keep up with the demands placed by these changes requires the development of computer-aided design and modeling tools (CAD/CAM) that enable designers to reduce the time and cost it takes to produce working prototypes. An ideal scenario is one in which a designer is able to quickly model and simulate an entire microsystem - sensors, actuators and electronics -- with the certainty that their results will match that of physical prototypes. This vision of design requires the existence of system level models of MEMS devices that can capture the complex non-linear coupling between multiple physical domains, yet be sufficiently fast and compact in form to insert into a system dynamics simulator. In this thesis I explore techniques of automatically constructing such models from meshed representations of device geometry. These dynamical models are known as "reduced-order" models or "macromodels." They are characterized by few degrees of freedom (DOF), and a small set of state equations. Our process for constructing macromodels is built upon two well-established methodologies - normal mode superposition and Lagrangian mechanics. This is referred to as the "CHURN process" and was originally developed by Gabbay et al. to create models of electromechanical devices with two electrodes under conditions satisfying linear mechanics.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2002

Author dc:creator

• Varghese, Mathew, 1973-

Advisor dc:contributor.advisor

• Stephen D. Senturia.

• Electrical Engineering and Computer Science.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/8342

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/8342