Chemical and physical methods of the templated direction of block copolymers

This thesis discusses the investigation of various aspects of templated self-assembly of block copolymer (BCP) thin films for nanofeature fabrication. Two chapters outline the research of a combined physical and chemical templating method with two BCPs. The method was not effective in templating poly(styrene-block-methyl methacrylate) (PS-b-PMMA) BCP because of limited template wettability. The method effectively templated poly(octofluro pentamethacrylate-block-hydroxystyrene) (OFPMA-b-HSM) BCP to fabricate orthogonally-directed lamellar microdomains and nanohole-mesh arrays. Chapter 4 discusses the achievement of a mean overlay accuracy of 52 nm and 0' for two electron-beam-based lithographic features as a result of an investigated overlay process. Lastly, the thesis reports the fabrication of a wide-range of nanofeatures - from two-dimensional and three dimensional nanoholes arrays to elliptical and cylindrical meshes - by the sacrificial-post templating method with poly(styreneblock- dimethylsiloxane) (PS-b-PDMS) BCP.

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2012

Author dc:creator

• Nicaise, Samuel M. (Samuel Mospens)

Advisor dc:contributor.advisor

• Karl K. Berggren.

• Electrical Engineering and Computer Science.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/78469

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/78469