Control of a MEMS fast steering mirror for laser applications

A control system for a MEMS fast steering mirror is designed and implemented to accurately steer a laser beam. This document contains a characterization of important mirror characteristics and the full analysis of an analog control system designed to maximize the performance of the mirror. A full analysis of the performance of the design, including bandwidth, stability, accuracy, power consumption, and system size and weight, is provided along with optical scan expansion designs. Finally, future possible improvements to the design are discussed.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2012

Author dc:creator

• Lane, Joseph Kerivan

Advisor dc:contributor.advisor

• James K. Roberge and Gary Shaw.

• Electrical Engineering and Computer Science.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/77445

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/77445