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Massachusetts Institute of Technology

Integration of photonic and passive microfluidic devices into lab-on-chip with femtosecond laser materials processing

Abstract

dc:description.abstract

Femtosecond laser materials processing is a powerful method for the integration of high resolution, 3D structures into Lab-On-Chip (LOC) systems. One major application of femtosecond laser materials processing is waveguide fabrication in glass via index modification. We demonstrate the ability to fabricate couplers and Mach-Zehnder Interferometers (MZI) with good repeatability and flexibility. An in-depth characterization of the spectral characteristics of symmetric directional couplers and MZI is presented. The spectral data from a series of unbalanced MZI is used to characterize changes in the waveguide propagation constant. Towards integrated sensing, we demonstrate the application of femtosecond laser waveguide fabrication to the integration of a MZI into a homemade and commercial LOC for label-free optical detection. The MZI has a unique tilted 3D geometry with one arm crossing a microfluidic channel and enables spatially resolved sensing of changes in the refractive index of the content inside the channel with a limit of detection as low as 1x10 4 RIU. Another major technique in femtosecond laser materials processing is femtosecond two-photon polymerization (TPP). TPP is used to integrate 3D porous filters into a commercial LOC and testing of the filter shows virtually 100% efficient separation of 3 tm polystyrene spheres from a liquid solution. The direct write and maskless nature of femtosecond materials processing makes it a powerful method to integrate 3D devices into LOC without altering existing elements or changing the microfluidic channel fabrication.

Degree

thesis:*
Department dc:contributor.department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Grantor dc:publisher
Massachusetts Institute of Technology
Year dc:date.issued
2011

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Gu, Yu, Ph.D. Massachusetts Institute of Technology
Advisor dc:contributor.advisor
  • James G. Fujimoto.

Subjects

dc:subject × 1

Rights

dc:rights
Statement dc:rights
  • M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Language dc:language.iso
eng

Identifiers

dc:identifier.*
Handle dc:identifier.uri
http://hdl.handle.net/1721.1/66004
OAI identifier oai:identifier
oai:dspace.mit.edu:1721.1/66004

Chain of custody

source
Harvested from
MIT
Base URL
dspace.mit.edu/oai/request
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Gu, Yu, Ph.D. Massachusetts Institute of Technology. Integration of photonic and passive microfluidic devices into lab-on-chip with femtosecond laser materials processing. Massachusetts Institute of Technology, 2011. http://hdl.handle.net/1721.1/66004