The use of ionic liquid ion sources (ILIS) in FIB applications

A new monoenergetic, high-brightness ion source can be constructed using an arrangement similar to liquid metal ion sources (LMIS) by substituting the liquid metal with an ionic liquid, or room temperature molten salt. Ion beams produced by these ionic liquid ion sources (ILIS) have energy deficits and distributions that closely resemble their metallic counterparts, with the exception that, if needed, they can be stably operated at current levels as low as a few nA. ILIS sources are here presented as having two further key advantages: (1) the ability to obtain both positive and negative ion beams, and (2) the ability to produce very diverse molecular ions in terms of their masses, compositions and properties, due to the fact that the number of available ionic liquids is large. In this thesis an overview of ILIS sources is presented, as well as preliminary results of their performance in a FIB column.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Aeronautics and Astronautics.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2009

Author dc:creator

• Zorzos, Anthony Nicholas

Advisor dc:contributor.advisor

• Paulo Lozano.

• Aeronautics and Astronautics.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/51647

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/51647