{"id":{"repo_id":"mit","oai_identifier":"oai:dspace.mit.edu:1721.1/46052"},"canonical_url":"https://search.dev.ndltd.org/etd/mit/oai:dspace.mit.edu:1721.1/46052","repository":{"repo_id":"mit","name":"MIT","base_url":"https://dspace.mit.edu/oai/request"},"display":{"title":"The development and characterization of kinematic interfaces for the semiconductor industry","abstract":"Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.","abstract_html":"Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.","abstract_has_math":false,"creators":["Alden, John C. (John Christopher)"],"institution":"Massachusetts Institute of Technology","degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":"Massachusetts Institute of Technology. Dept. of Mechanical Engineering","school":null,"contributors":[],"advisors":["Alexander Slocum."],"committee_chairs":[],"committee_members":[],"year":1997,"date_issued":"1997","date_published":"1997","updated_at":"2026-07-22T22:21:16Z","subjects":["Mechanical Engineering"],"languages":["eng"],"rights":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."],"rights_urls":["http://dspace.mit.edu/handle/1721.1/7582"],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/1721.1/46052","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.advisor","label":"Advisor","values":["Alexander Slocum."]},{"key":"dc:contributor.department","label":"Department","values":["Massachusetts Institute of Technology. Dept. of Mechanical Engineering"]},{"key":"dc:creator","label":"Author","values":["Alden, John C. (John Christopher)"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2009-06-30T17:09:24Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2009-06-30T17:09:24Z"]},{"key":"dc:date.issued","label":"Date","values":["1997"]},{"key":"dc:publisher","label":"Institution","values":["Massachusetts Institute of Technology"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Mechanical Engineering"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language.iso","label":"Language (ISO)","values":["eng"]},{"key":"dc:rights","label":"Dc Rights","values":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."]},{"key":"dc:rights.uri","label":"Rights URI","values":["http://dspace.mit.edu/handle/1721.1/7582"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.uri","label":"Identifier URI","values":["http://hdl.handle.net/1721.1/46052"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.","Includes bibliographical references (p. 100)."]},{"key":"dc:description.degree","label":"Dc Description Degree","values":["M.S."]},{"key":"dc:title","label":"Title","values":["The development and characterization of kinematic interfaces for the semiconductor industry"]}]}],"canonical_facts":{"dc:contributor.advisor":["Alexander Slocum."],"dc:contributor.department":["Massachusetts Institute of Technology. Dept. of Mechanical Engineering"],"dc:creator":["Alden, John C. (John Christopher)"],"dc:date.accessioned":["2009-06-30T17:09:24Z"],"dc:date.available":["2009-06-30T17:09:24Z"],"dc:date.issued":["1997"],"dc:description":["Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.","Includes bibliographical references (p. 100)."],"dc:description.degree":["M.S."],"dc:identifier.uri":["http://hdl.handle.net/1721.1/46052"],"dc:language.iso":["eng"],"dc:publisher":["Massachusetts Institute of Technology"],"dc:rights":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."],"dc:rights.uri":["http://dspace.mit.edu/handle/1721.1/7582"],"dc:subject":["Mechanical Engineering"],"dc:title":["The development and characterization of kinematic interfaces for the semiconductor industry"],"dc:type":["Thesis"]},"updated_at":"2026-07-22T22:21:16Z"}