Magnetic assisted statistical assembly

The objective of this thesis is to develop a process using magnetic forces to assemble micro-components into recesses on silicon based integrated circuits. Patterned SmCo magnetic thin films at the bottom of recesses are used to provide forces to orient, align and retain micro-devices on silicon. The overall objective is to obtain functionalities not readily available from silicon device structures alone. This thesis was done in the context of assembling optoelectronic devices, specifically integrating vertical cavity surface emitting lasers (VCSELs), edge-emitting lasers (EELs), and light emitting diodes(LEDs) onto commercially processed Si-CMOS circuits. This method, magnetically assisted statistical assembly (MASA), incorporates past methods such as Fluidic Assisted Self- Assembly (FASA) and Recess Mounting with Monolithic Metalization (RM3). Specifically, MASA addresses the main limitation to the FASA method by adding a magnetic layer as a restraint to keep assembled components correctly positioned in recesses until the time bonding may occur. Thus, all components may be permanently bonded into place simultaneously saving both time and money. This thesis will present simulations using Ansoft's Maxwell 3d providing general behavioral intuition for the behavior of a device over a target magnetic substrate. These results include using a rectangle instead of a circular disc and making recess depths greater than 2pm to overcome gravitational forces when inverting the substrate. Patterns of SmCo magnetic material, based on results from the simulations, included 50x100[mu]m recesses containing either a solid rectangle, thirty 5x10[mu]m rectangular pads, eighteen 5x10m rectangular pads or four 5x10m rectangular pads.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2008

Author dc:creator

• Cheng, Diana I

Advisor dc:contributor.advisor

• Clifton Fonstad.

• Electrical Engineering and Computer Science.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/45999

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/45999