{"id":{"repo_id":"mit","oai_identifier":"oai:dspace.mit.edu:1721.1/43136"},"canonical_url":"https://search.dev.ndltd.org/etd/mit/oai:dspace.mit.edu:1721.1/43136","repository":{"repo_id":"mit","name":"MIT","base_url":"https://dspace.mit.edu/oai/request"},"display":{"title":"Direct printing of lead zirconate titanate thin films","abstract":"Thus far, use of lead zirconate titanate (PZT) in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing techniques. Direct printing of thin films eliminates the need for photolithographic patterning and etching, as well as allows for controlled deposition over non-planar topographies which cannot be accomplished with conventional spin coating processes. This thesis reports the optimal conditions of deposition and crystallization for high dielectric quality PZT thin films via thermal ink jet printing. 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