Design, dynamic modeling, simulation and feedback control of hydrostatic bearing

A hydrostatic bearing carriage (Hydrocline) that uses an open face linear motor to drive the carriage as well as to preload the hydrostatic bearings has been developed by Professor Alexander Slocum and Gerald Rothenhöfer of the Massachusetts Institute of Technology's Mechanical Engineering Department. The Hydrocline is made to cope with the increasing requirements for accuracy in silicon wafer grinding machines. The prototype was built of aluminum oxide ceramic due to its high stiffness-to-weight ratio, low thermal expansion and corrosion resistance. In order to keep the cost of manufacturing as low as possible, a modular design that uses micron-level precision ceramic beams was chosen. Initial testing of the prototype carriage indicates that it has the following performance specifications: a vertical load capacity exceeding 5000N (theoretical limit at 12000N, max. pressure of pumps); a carriage pitch error of 0.7arc seconds; a yaw error of 0.7arc seconds; a roll error of +/- 0.6arcsec a vertical straightness at the center of the carriage of +/-0.75microns; and a vertical stiffness of the carriage of 900N per micron (load range from 0 to 1000N).

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Mechanical Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2007

Author dc:creator

• Rothenhöfer, Gerald S. (Gerald Sven)

Advisor dc:contributor.advisor

• Alexander H. Slocum.

• Mechanical Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/39888

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/39888