MEMS turbomachinery rotordynamics : modeling, design and testing

One of the major challenges encountered for the successful operation of high-power-density micro-devices lies in the stable operation of the bearings supporting the high-speed rotating machinery. This thesis presents the analysis, design, microfabrication, testing and operation of high speed micro-hydrostatic gas bearings for microturbomachinery in power-MEMS applications. A novel turbine driven microbearing test device for demonstrating repeatable high-speed gas bearing operation was designed, microfabricated and tested. The new microbearing test device incorporates numerous features, including a four plena journal bearing feed system enabling both isotropic and anisotropic journal bearing operation, labyrinth seals for reducing rotordynamic coupling, a redesigned turbine for satisfying power requirements, reinforced thrust bearing structural design, a novel rotor fabrication technology for achieving low radial imbalance and a symmetric feed system to avoid rotor sideloading arising from pressure or flow non-uniformities. A rigorous theory is presented to analyze the effects of compressibility in micro-flows (characterized by low Reynolds numbers and high Mach numbers) through hydrostatic thrust bearings for application to microturbomachines.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Aeronautics and Astronautics.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2006

Author dc:creator

• Teo, Chiang Juay

Advisor dc:contributor.advisor

• Zoltan S. Spakovszky.

• Aeronautics and Astronautics.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/36180

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/36180