Electromagnetically-driven ultra-fast tool servos for diamond turning

This thesis presents the design, implementation, and control of a new class of fast tool servos (FTS). The primary thesis contributions include the design and experimental demonstration of: novel ultra-fast electromagnetic actuators, integration of these actuators in a new class of FTS, a novel real-time control computer with 1 million samples per second throughput, MIMO loop shaping techniques for parallel power amplifiers, and a novel configuration and controller tuning method for implementing adaptive feed-forward cancellation control. All of these elements have been successfully used for diamond turning of contoured surfaces. Fast tool servos (FTS) are high bandwidth positioning devices, which, in conjunction with an ultra-precision lathe and diamond tooling, can produce free form surfaces with nanometer-scale resolution, such as required in micro-optical devices and light-enhancing films. The increasing complexity of such surfaces requires more components in shorter spatial wavelengths, and thus drives simultaneously the need for high bandwidth, high acceleration and high accuracy of the FTS. Conventional FTS solutions are based on piezoelectric stacks, which are typically limited to a few micron stroke at 1 kHz operation if not operated in a resonant mode.

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Mechanical Engineering

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2005

Author dc:creator

• Lu, Xiaodong, Ph. D. Massachusetts Institute of Technology

Advisor dc:contributor.advisor

• David L. Trumper.

• Mechanical Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/35622

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/35622