Integrated thin film batteries on silicon

Monolithic integration has been implemented successfully in complementary metal oxide semiconductor (CMOS) technology and led to improved device performance, increased reliability, and overall cost reduction. The next element to be incorporated on the silicon chip is the power unit; possibly as part of the back end process of the very large scale integrated (VLSI) circuits' production. This thesis describes the work done in developing and studying thin film integrated lithium ion batteries compatible with microelectronics with respect to the material system employed, the cells' fabrication methods, and performance. The project consisted of three stages; first, a material system new to the battery application field was explored and power cells were fabricated and characterized. In the second stage, the fabrication process of the first material system cells was optimized thereby improving their performance. The third stage dealt with a more conventional battery material system, utilizing thin film technology to fabricate and explore power cells.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2005

Author dc:creator

• Ariel, Nava

Advisor dc:contributor.advisor

• Eugene A. Fitzgerald.

• Materials Science and Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/33612

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/33612