{"id":{"repo_id":"mit","oai_identifier":"oai:dspace.mit.edu:1721.1/33107"},"canonical_url":"https://search.dev.ndltd.org/etd/mit/oai:dspace.mit.edu:1721.1/33107","repository":{"repo_id":"mit","name":"MIT","base_url":"https://dspace.mit.edu/oai/request"},"display":{"title":"Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges","abstract":"This thesis addresses the construction of complex three-dimensional (3-D) nanostructures using only 2-D, planar nano-fabrication techniques. In the state of the art, multiple 2-D layers are fabricated in series, each directly on top of the previous. The method advocated here is Nanostructured Origami, in which multiple adjacent 2-D layers are fabricated in parallel and are then folded into the desired 3-D configuration using the appropriate folding sequence. This thesis focuses on folding actuation for this method using the residual tensile stress in vacuum-evaporated chromium to fold silicon nitride membranes. Our results conclusively demonstrate the ability to pattern these membranes with nano-scale features and then controllably fold them into a predetermined 3-D configuration. Future work will refine the fabrication procedure for large-scale manufacturing and address alignment and latching of the folded membranes.","abstract_html":"This thesis addresses the construction of complex three-dimensional (3-D) nanostructures using only 2-D, planar nano-fabrication techniques. In the state of the art, multiple 2-D layers are fabricated in series, each directly on top of the previous. The method advocated here is Nanostructured Origami, in which multiple adjacent 2-D layers are fabricated in parallel and are then folded into the desired 3-D configuration using the appropriate folding sequence. This thesis focuses on folding actuation for this method using the residual tensile stress in vacuum-evaporated chromium to fold silicon nitride membranes. Our results conclusively demonstrate the ability to pattern these membranes with nano-scale features and then controllably fold them into a predetermined 3-D configuration. Future work will refine the fabrication procedure for large-scale manufacturing and address alignment and latching of the folded membranes.","abstract_has_math":false,"creators":["Arora, William Jay"],"institution":"Massachusetts Institute of Technology","degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":"Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.","school":null,"contributors":[],"advisors":["George Barbastathis and Henry I. 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