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Massachusetts Institute of Technology
Crystallization in self-implanted polycrystalline silicon-on-insulator films
Abstract
dc:descriptionBibliography: leaves 118-122.
Degree
thesis:*- Department dc:contributor.department
- Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
- Grantor dc:publisher
- Massachusetts Institute of Technology
- Year dc:date.issued
- 1987
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Iverson, Ralph Benhart
- Advisor dc:contributor.advisor
-
- L. Rafael Reif.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
- Licence dc:rights.uri
- Language dc:language.iso
- eng
Identifiers
dc:identifier.*- Handle dc:identifier.uri
- http://hdl.handle.net/1721.1/32570
- OAI identifier oai:identifier
- oai:dspace.mit.edu:1721.1/32570