Switchable stiffness scanning microscope probe

Atomic Force Microscopy (AFM) has rapidly gained widespread utilization as an imaging device and micro/nano-manipulator during recent years. This thesis investigates the new concept of a dual stiffness scanning probe with respect to biological applications and determines the resulting requirements for the scanning of soft bio samples, such as low-pressure contact. On this basis, an in-plane AFM probe that is specifically tailored to the needs of biological applications is developed. It features a variable stiffness, which makes the stiffness of the probe adjustable to the surface hardness of the sample, and a very low overall stiffness, which is needed in order to achieve high resolution imaging. The switchable stiffness probe allows the scanning of biological samples with varying surface hardness without changing probes during scanning, and therefore prevents a loss of positional information, as is unavoidable with conventional devices. For the integration of the components into a MEMS device, the conventional cantilever-type design of AFM probes has been abandoned in favor of an in-plane design. The new design has an advantage in that it facilitates a high-density array of AFM probes and allows for easy surface micromachining of the integrated device. It also enables the future integration of micro-fluidic channels for reagent delivery and nanopipetting. For the scanning of nano-scale trenches and grooves, a multi-walled carbon nanotube, embedded in a nanopellet, is planned as a high-aspect-ratio tip. The variable stiffness is accomplished in a mechanical way by engaging or disengaging auxiliary beams to the compliant beam structure by means of electrostatically actuated clutches.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Mechanical Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2005

Author dc:creator

• Mueller-Falcke, Clemens T. (Clemens Tobias)

Advisor dc:contributor.advisor

• Sang-Gook Kim.

• Mechanical Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/32349

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/32349