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Massachusetts Institute of Technology
Particle characterization for an eight inch wafer tungsten chemical vapor deposition system
Abstract
dc:descriptionThesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
Degree
thesis:*- Department dc:contributor.department
- Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
- Grantor dc:publisher
- Massachusetts Institute of Technology
- Year dc:date.issued
- 1994
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Morrison, Troy
- Advisor dc:contributor.advisor
-
- Lionel C. Kimerling.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
- Licence dc:rights.uri
- Language dc:language.iso
- en_US
Identifiers
dc:identifier.*- Handle dc:identifier.uri
- http://hdl.handle.net/1721.1/28051
- OAI identifier oai:identifier
- oai:dspace.mit.edu:1721.1/28051