The effects of mechanical coupling on the electrical impedance of MEMS resonators for UHF filter applications

(cont.) This thesis presents finite elements based simulations of electromechanical transfer functions for resonator and filter geometries. These Finite Element Analysis (FEA) simulations are performed using the ANSYS software and demonstrate the significance of mechanical coupling between MEMS longitudinal-mode bar (L-Bar) resonators. An analytical model and equivalent circuit are derived for a single L-Bar resonator. The analytical derivation is validated with an FEA model having the same material parameters and boundary conditions. The center frequency and resonant impedance produced by the FEA model are within 1% of the analytical values. A boundary condition study is undertaken to determine the sensitivity of the L-Bar resonator model to changes in the peripheral geometry and displacement constraints. A comparison of FEA results indicates that a simple resonator model with only tether supports yields impedance and center frequency values comparable to those of more complex geometries. When compared to initial experimental results from an actual resonator, the simulated electrical output corresponds well to the actual transfer function. This study also introduces a method for calculating the parameters of the resonator's equivalent circuit model from simulated (or measured) transfer function data. The method is tested on simulation data for which a mechanical Quality factor is designated. Comparing the prescribed mechanical Q to the extracted circuit Q provides a consistency check for the technique. The parameter extraction technique is a useful first attempt to devise a comprehensive method for determining circuit parameters that will reliably reproduce the transfer function of an actual resonator. Finally, a new resonator topology

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Mechanical Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2004

Author dc:creator

• Hohreiter, Luke A. (Luke Alfred), 1979-

Advisor dc:contributor.advisor

• Amy E. Duwel.

• Mechanical Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

en_US

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/27080

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/27080