Interactions of Kr(F₂), O₂, and (O₂)₂ with Si(100)

The high reactivity of XeF₂ with fluorinated Si is proposed to arise from localized vibrational excitation of the Si lattice as a result of the multiple collisions required to reverse the momentum of the heavier XeF₂ incident on the lighter Si lattice. This study is part of a series of experimental studies to test the hypothesis that the mass of the incident molecule is responsible for the collision induced vibrational excitation that leads to enhanced reactivity by varying the mass of the inert gas X in a X(F₂) van der Waals (vdW) molecule. The reaction probability of Kr(F₂) towards fluorinated Si(100) is measured to be 0.2±0.1, which is around two orders of magnitude higher than that of the lighter F₂ and almost one order of magnitude lower than that of the heavier XeF₂/Xe(F₂), thereby supporting the viability of the proposed mechanism. Dissociative adsorption of triplet O₂ on the singlet Si(100) surface is spin-forbidden.

Name thesis:degree_name

Doctoral

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Chemistry

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2021

Author dc:creator

• Sathitwitayakul, Thanasak.

Advisor dc:contributor.advisor

• Sylvia T. Ceyer.

• Chemistry.

Statement dc:rights

• MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

https://hdl.handle.net/1721.1/130827

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/130827