Guided etching and deposition of transition metal dichalcogenides

Two-dimensional (2D) transition metal dichalcogenides (TMDs) with engineered nanopores have been suggested as a promising materials system in membrane and catalysis applications in both the energy and environment fields. Because of its atomic thinness, 2DTMDs are promising candidates for osmosis energy harvesting membranes. Furthermore, the scalable nanopore preparation in MoS₂ crystals provides a more cost-efficient option replacing precious metal-based catalyst for hydrogen evolution reactions catalysis. As an emerging class of semiconductor materials, 2D-TMDs have also attracted attention in electronic and optoelectronic applications, which require lithography processes to define the desired device structure. However, conventional top-down patterning methods rely on temporarily coating a polymer-based resist, which has been found challenging to remove completely and as such is detrimental to 2D devices.

Name thesis:degree_name

Doctoral

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Materials Science and Engineering

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2020

Author dc:creator

• Ke, Jian-An.

Advisor dc:contributor.advisor

• Silvija Gradečak and Jing Kong.

• Materials Science and Engineering.

Statement dc:rights

• MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

https://hdl.handle.net/1721.1/127901

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/127901