Laser direct-write fabrication of MEMS

Micro-electromechanical systems (MEMS) have many applications in healthcare, consumer electronics, and automobile industry. Unfortunately, the development of novel MEMS is significantly hindered by the limitations of the state-of-the-art MEMS microfabrication processes such as high cost of equipment ownership, long development time, and limited choice of fabrication material selection and integration. Recent developments in alternate MEMS fabrication processes such as PCB-MEMS, laminate MEMS, pop-up book MEMS, and soft-MEMS have reduced fabrication cost, increased material choice, and facilitated material integration. However, MEMS fabricated using these methods have large feature size and low aspect ratio as compared to MEMS produced utilizing conventional deep reactive ion etching (DRIE) microfabrication process. Moreover, fabricating MEMS with six degrees of freedom (DOF) free-standing microstructures using these processes is challenging.

Name thesis:degree_name

Doctoral

Department dc:contributor.department

Program in Media Arts and Sciences (Massachusetts Institute of Technology)

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2019

Author dc:creator

• Patil, Prashant(Prashant Tarachand)

Advisor dc:contributor.advisor

• Neil Gershenfeld.

• Program in Media Arts and Sciences

Statement dc:rights

• MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

https://hdl.handle.net/1721.1/124084

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/124084