Nanoscale membranes for electromechanical systems

Micro- and nano-electromechanical systems (MEMS/NEMS) are a technology field that branched out of semiconductor integrated circuit (IC) manufacturing about four decades ago, and one that forms the backbone of the Internet of Things era. However, as MEMS devices are becoming ubiquitous, they are also being limited by the narrow platform of IC material sets and design parameters, which significantly constrain prevalent MEMS functions and applications. In order to expand the application space of MEMS/NEMS, it is imperative that novel material platforms and manufacturing methods are considered. The basic building block of the approach demonstrated in this work is a suspended membrane of nanoscale thickness (or "nanomembrane") that is first separately fabricated, and then additively donated via contact-transfer printing to complete a nanostructured variable-capacitance device.

Name thesis:degree_name

Doctoral

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2019

Author dc:creator

• Murarka, Apoorva.

Advisor dc:contributor.advisor

• Vladimir Bulović and Jeffrey H. Lang.

• Electrical Engineering and Computer Science.

Statement dc:rights

• MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

https://hdl.handle.net/1721.1/124068

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/124068