Simulation of X-ray phase imaging on integrated circuits

A study on the simulation of the X-Ray phase imaging on multi-layered integrated circuits (IC) is presented. Model IC's were created with random nanoscale features. First order Rytov approximation was then used in order to accurately and rapidly create diffraction images. This study lays the foundation for future use as a forward model in limited-angle tomography or other inverse problems approaches (e.g neural networks) to reconstruct IC layout from x-ray diffraction images. In particular, it is hoped that the simulation presented here can be used to train neural networks that will carry out the inverse problem in experimental situations. The results of the study show that the first Rytov method is promising for use in this application of IC reconstruction.

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Mechanical Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2017

Author dc:creator

• Arthur, Kwabena (Kwabena K.)

Advisor dc:contributor.advisor

• George Barbastathis.

• Mechanical Engineering.

Statement dc:rights

• MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/115456

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/115456