{"id":{"repo_id":"missouri","oai_identifier":"oai:mospace.umsystem.edu:10355/6083"},"canonical_url":"https://search.dev.ndltd.org/etd/missouri/oai:mospace.umsystem.edu:10355/6083","repository":{"repo_id":"missouri","name":"University of Missouri","base_url":"https://mospace.umsystem.edu/oai/request"},"display":{"title":"Low loss film bulk acoustic resonator in liquid environments","abstract":"[ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI-COLUMBIA AT AUTHOR'S REQUEST.] A film bulk acoustic resonator (FBAR) is an acoustic resonator mass sensor using the resonance of longitudinal or shears acoustic waves. There is a significant Q factor loss in liquid medium due to acoustic energy loss. This drastically affects the minimum detectable mass of the sensor. This research describes the design and fabrication of an FBAR that has low loss in liquid environments. The new design utilizes a thin vacuum gap as an acoustic energy loss isolation layer of the FBAR in the aqueous media. The sensor was characterized and the Q factor was measured to be about 153 in the air and 140 in the water. An only 9% of Q reduction in the water was observed. This thesis also describes a novel temperature sensor which has been designed and fabricated by using a liquid metal, which connects a series of parallel-plate capacitors. Linearly and stably changing capacitance with respect to the temperature variation was observed from the sensor. The capacitance changes from about 0.015pF at 0[degree sign]C to about 0.322pF at 90[degree sign]C.","abstract_html":"[ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI-COLUMBIA AT AUTHOR'S REQUEST.] A film bulk acoustic resonator (FBAR) is an acoustic resonator mass sensor using the resonance of longitudinal or shears acoustic waves. There is a significant Q factor loss in liquid medium due to acoustic energy loss. This drastically affects the minimum detectable mass of the sensor. This research describes the design and fabrication of an FBAR that has low loss in liquid environments. The new design utilizes a thin vacuum gap as an acoustic energy loss isolation layer of the FBAR in the aqueous media. The sensor was characterized and the Q factor was measured to be about 153 in the air and 140 in the water. An only 9% of Q reduction in the water was observed. This thesis also describes a novel temperature sensor which has been designed and fabricated by using a liquid metal, which connects a series of parallel-plate capacitors. Linearly and stably changing capacitance with respect to the temperature variation was observed from the sensor. The capacitance changes from about 0.015pF at 0[degree sign]C to about 0.322pF at 90[degree sign]C.","abstract_has_math":false,"creators":["Pottigari, Sai Sumanth"],"institution":"University of Missouri--Columbia","degree_name":"M.S.","degree_level":"Masters","degree_discipline":"Electrical and computer engineering (MU)","degree_department":null,"school":null,"contributors":[],"advisors":["Kwon, Jae Wan"],"committee_chairs":[],"committee_members":[],"year":2008,"date_issued":"2008","date_published":"2008","updated_at":"2026-07-24T03:09:39Z","subjects":[],"languages":["eng","English"],"rights":["Access to files is limited to the University of Missouri--Columbia with SSO login."],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier.doi","label":"DOI","values":["https://doi.org/10.32469/10355/6083"],"render_values":[{"text":"https://doi.org/10.32469/10355/6083","href":"https://doi.org/10.32469/10355/6083","code":true}]}]},"links":{"outbound_url":"https://hdl.handle.net/10355/6083","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.advisor","label":"Advisor","values":["Kwon, Jae Wan"]},{"key":"dc:creator","label":"Author","values":["Pottigari, Sai Sumanth"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2010-02-24T19:36:27Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2010-02-24T19:36:27Z"]},{"key":"dc:date.issued","label":"Date","values":["2008"]},{"key":"dc:publisher","label":"Institution","values":["University of Missouri--Columbia"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical and computer engineering (MU)"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Masters"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Missouri--Columbia"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["English"]},{"key":"dc:language.iso","label":"Language (ISO)","values":["eng"]},{"key":"dc:rights","label":"Dc Rights","values":["Access to files is limited to the University of Missouri--Columbia with SSO login."]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.doi","label":"DOI","values":["https://doi.org/10.32469/10355/6083"]},{"key":"dc:identifier.uri","label":"Identifier URI","values":["https://hdl.handle.net/10355/6083"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["The entire thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file; a non-technical public abstract appears in the public.pdf file.","Title from PDF of title page (University of Missouri--Columbia, viewed on October 7, 2009)","Thesis advisor: Dr. Jae Wan Kwon,","Access is limited to the campus of the University of Missouri-Columbia.","M.S. 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This thesis also describes a novel temperature sensor which has been designed and fabricated by using a liquid metal, which connects a series of parallel-plate capacitors. Linearly and stably changing capacitance with respect to the temperature variation was observed from the sensor. The capacitance changes from about 0.015pF at 0[degree sign]C to about 0.322pF at 90[degree sign]C."]},{"key":"dc:title","label":"Title","values":["Low loss film bulk acoustic resonator in liquid environments"]}]}],"canonical_facts":{"dc:contributor.advisor":["Kwon, Jae Wan"],"dc:creator":["Pottigari, Sai Sumanth"],"dc:date.accessioned":["2010-02-24T19:36:27Z"],"dc:date.available":["2010-02-24T19:36:27Z"],"dc:date.issued":["2008"],"dc:description":["The entire thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file; a non-technical public abstract appears in the public.pdf file.","Title from PDF of title page (University of Missouri--Columbia, viewed on October 7, 2009)","Thesis advisor: Dr. Jae Wan Kwon,","Access is limited to the campus of the University of Missouri-Columbia.","M.S. 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