This thesis provides a scientific investigation of the ablation behavior of single crystal 4H-SiC and 6H-SiC to improve the manufacturability and high-temperature performance of SiC based MEMS pressure sensors using laser applications. The ablation characteristics of both the polytypes were studied using pulsed lasers and micromachining results were presented. The study shows the possibility of these devices capable of operating in harsh environments.
","abstract_html":"<p>This thesis provides a scientific investigation of the ablation behavior of single crystal 4H-SiC and 6H-SiC to improve the manufacturability and high-temperature performance of SiC based MEMS pressure sensors using laser applications. The ablation characteristics of both the polytypes were studied using pulsed lasers and micromachining results were presented. The study shows the possibility of these devices capable of operating in harsh environments.</p>","abstract_has_math":false,"creators":["Gupta, Saurabh"],"institution":null,"degree_name":"Master of Science","degree_level":"thesis","degree_discipline":null,"degree_department":"Department of Mechanical Engineering","school":null,"contributors":[],"advisors":["Palaniappa A. Molian"],"committee_chairs":[],"committee_members":[],"year":2008,"date_issued":"2008-01-01","date_published":"2008-01-01","updated_at":"2026-07-24T02:39:30Z","subjects":[],"languages":["en"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier.doi","label":"DOI","values":["https://doi.org/10.31274/etd-180810-2407"],"render_values":[{"text":"https://doi.org/10.31274/etd-180810-2407","href":"https://doi.org/10.31274/etd-180810-2407","code":true}]},{"key":"dc:identifier","label":"Identifier","values":["archive/lib.dr.iastate.edu/etd/10866/"],"render_values":[{"text":"archive/lib.dr.iastate.edu/etd/10866/","href":null,"code":true}]}]},"links":{"outbound_url":"https://dr.lib.iastate.edu/handle/20.500.12876/25072","outbound_label":"Repository record","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.advisor","label":"Advisor","values":["Palaniappa A. Molian"]},{"key":"dc:contributor.department","label":"Department","values":["Department of Mechanical Engineering"]},{"key":"dc:creator","label":"Author","values":["Gupta, Saurabh"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2018-08-11T10:56:36.000"]},{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2020-06-30T02:31:34Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2020-06-30T02:31:34Z"]},{"key":"dc:date.issued","label":"Date","values":["2008-01-01"]},{"key":"dc:type","label":"Dc Type","values":["thesis"]},{"key":"thesis:degree_level","label":"Degree Level","values":["thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Master of Science"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language.iso","label":"Language (ISO)","values":["en"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["archive/lib.dr.iastate.edu/etd/10866/"]},{"key":"dc:identifier.doi","label":"DOI","values":["https://doi.org/10.31274/etd-180810-2407"]},{"key":"dc:identifier.uri","label":"Identifier URI","values":["https://dr.lib.iastate.edu/handle/20.500.12876/25072"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["This thesis provides a scientific investigation of the ablation behavior of single crystal 4H-SiC and 6H-SiC to improve the manufacturability and high-temperature performance of SiC based MEMS pressure sensors using laser applications. The ablation characteristics of both the polytypes were studied using pulsed lasers and micromachining results were presented. The study shows the possibility of these devices capable of operating in harsh environments.
"]},{"key":"dc:format.mimetype","label":"Dc Format Mimetype","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Pulsed laser ablation and micromachining of 4H and 6H SiC wafers for high-temperature MEMS sensors"]}]}],"canonical_facts":{"dc:contributor.advisor":["Palaniappa A. Molian"],"dc:contributor.department":["Department of Mechanical Engineering"],"dc:creator":["Gupta, Saurabh"],"dc:date":["2018-08-11T10:56:36.000"],"dc:date.accessioned":["2020-06-30T02:31:34Z"],"dc:date.available":["2020-06-30T02:31:34Z"],"dc:date.issued":["2008-01-01"],"dc:description.abstract":["This thesis provides a scientific investigation of the ablation behavior of single crystal 4H-SiC and 6H-SiC to improve the manufacturability and high-temperature performance of SiC based MEMS pressure sensors using laser applications. The ablation characteristics of both the polytypes were studied using pulsed lasers and micromachining results were presented. The study shows the possibility of these devices capable of operating in harsh environments.
"],"dc:format.mimetype":["application/pdf"],"dc:identifier":["archive/lib.dr.iastate.edu/etd/10866/"],"dc:identifier.doi":["https://doi.org/10.31274/etd-180810-2407"],"dc:identifier.uri":["https://dr.lib.iastate.edu/handle/20.500.12876/25072"],"dc:language.iso":["en"],"dc:title":["Pulsed laser ablation and micromachining of 4H and 6H SiC wafers for high-temperature MEMS sensors"],"dc:type":["thesis"],"thesis:degree_level":["thesis"],"thesis:degree_name":["Master of Science"]},"updated_at":"2026-07-24T02:39:30Z"}