Permeability Spectra of Electrodeposited CoFe Film for Inductor Applications

Thin film electronic components play a crucial role in integrated circuits, enabling miniaturization in the semiconductor industry. With the continuous demand for smaller devices, the manufacturing of passive components like inductors and voltage regulators presents challenges. Research trends have focused on RF and power electronics applications for Micro Electromechanical Devices (MEMs), with promising growth in biomedical, neurotechnology, and wireless/sensor applications. Power control techniques, such as dynamic voltage and frequency scaling (DVFS), enhance system efficiency by adjusting clock frequency and voltage based on computational load. Integrated voltage regulators, particularly fully integrated voltage regulators (FIVRs), are essential for DVFS implementation, leading to the development of new magnetic materials. Achieving miniaturization with FIVRs is crucial, as conventional voltage regulators occupy a significant portion of motherboard space. The use of FIVRs reduces losses associated with larger circuit sizes and longer connections. The implementation of FIVRs in processors has significantly improved power efficiency. To fabricate FIVRs, the development of miniaturized inductors is vital. Traditional materials like ferrites are unsuitable due to their low stability frequency. Thin film alloy deposition methods, such as electrodeposition, offer scalability and cost efficiency. This thesis investigates the influence of electrochemical process parameters and substrate materials on the permeability spectra of thin film CoFe alloys. The analysis involves methodologies such as SEM-EDS, EQCMB, a 4-point probe, and VNA.

Name thesis:degree_name

Master of Science

Level thesis:degree_level

Masters

Discipline thesis:degree_discipline

Materials Engineering

Grantor

University of Houston

Year dc:date.issued

2023

Author dc:creator

• Berkem, Alphan

Advisor dc:contributor.advisor

• Brankovic, Stanko R.

Committee members dc:contributor.committeemember

• Litvinov, Dmitri
• Bao, Jiming

• Electrochemistry, Magnetic Materials, Permeability, High Frequency, Permeability Spectra, CoFe thin film

Statement dc:rights

• The author of this work is the copyright owner. UH Libraries and the Texas Digital Library have their permission to store and provide access to this work. Further transmission, reproduction, or presentation of this work is prohibited except with permission of the author(s).

Language dc:language.iso

eng

Handle dc:identifier.uri

https://hdl.handle.net/10657/15971

OAI identifier oai:identifier

oai:uh-ir.tdl.org:10657/15971