Back to results
ETH Zurich
Computational enhancement of defect sensitivity in lensless EUV mask inspection
Degree
thesis:*- Grantor dc:publisher
- ETH Zurich
- Year dc:date
- 2022
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Wöhrwag, Ricarda Maria
- Contributors dc:contributor
-
- Aeppli, Gabriel
- Ekinci, Yasin
- Juschkin, Larissa
- Mochi, Iacopo
Subjects
dc:subject × 3Rights
dc:rights- Statement dc:rights
-
- info:eu-repo/semantics/openAccess
- In Copyright - Non-Commercial Use Permitted
- Language dc:language
- en
Identifiers
dc:identifier.*- Identifier
- https://doi.org/10.3929/ethz-b-000559840
- OAI identifier oai:identifier
- oai:www.research-collection.ethz.ch:20.500.11850/559840