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ETH
Investigation of the local Ge concentration in Si/SiGe nanostructures by convergent-beam electron diffraction
Degree
thesis:*- Grantor dc:publisher
- ETH
- Year dc:date
- 2008
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Ruh, Elisabeth Margrit
- Contributors dc:contributor
-
- Ensslin, Klaus
- Grützmacher, Detlev
Subjects
dc:subject × 5- SILICIUM-GERMANIUM-VERBINDUNGEN (ANORGANISCHE CHEMIE); KRISTALLSTRUKTURANALYSE MIT ELEKTRONENSTRAHLEN; MIKROSTRUKTUR VON MOLEKULARSYSTEMEN (PHYSIK); NANOSTRUKTURIERTE MATERIALIEN (PHYSIK DER KONDENSIERTEN MATERIE); SILICON-GERMANIUM COMPOUNDS (INORGANIC CHEMISTRY); CRYSTAL STRUCTURE ANALYSIS BY ELECTRON BEAMS; MICROSTRUCTURE OF MOLECULAR SYSTEMS (PHYSICS); NANOSTRUCTURED MATERIALS (CONDENSED MATTER PHYSICS)
- info:eu-repo/classification/ddc/530
- info:eu-repo/classification/ddc/620
- Physics
- Engineering & allied operations
Rights
dc:rights- Statement dc:rights
-
- info:eu-repo/semantics/openAccess
- In Copyright - Non-Commercial Use Permitted
- Language dc:language
- en
Identifiers
dc:identifier.*- Identifier
- https://doi.org/10.3929/ethz-a-005750047