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Technische Universiteit Eindhoven
In situ ellipsometrie bij plasma-etsen spectroscopische infraroodellipsometrie
Degree
thesis:*- Name dc:type.qualificationname
- Master
- Level dc:type.qualificationlevel
- Studentthesis types
- Year dc:date.issued
- 1989
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Creyghton, Y.L.M.
- Advisor dc:contributor.advisor
-
- Kroesen, Gerrit
Rights
- Language dc:language
- nld
Identifiers
dc:identifier.*- Identifier
- oai:pure.tue.nl:studenttheses/34411873-0f92-470b-99b6-b9700b133154
- OAI identifier oai:identifier
- oai:pure.tue.nl:studenttheses/34411873-0f92-470b-99b6-b9700b133154