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Colorado School of Mines. Arthur Lakes Library
Evaluation of the corrosion resistance of yttrium aluminum garnet thin films to hydrogen fluoride gas in CVD applications
Abstract
dc:descriptionIncludes bibliographical references (pages 51-53).
Degree
thesis:*- Name thesis:degree_name
- Master of Science (M.S.)
- Level thesis:degree_level
- Masters
- Discipline thesis:degree_discipline
- Metallurgical and Materials Engineering
- Grantor dc:publisher
- Colorado School of Mines. Arthur Lakes Library
- Year dc:date.issued
- 2002
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Sogue, Laketch T.
- Advisor dc:contributor.advisor
-
- Mishra, Brajendra
Rights
dc:rights- Statement dc:rights
-
- Copyright of the original work is retained by the author.
- Language dc:language.iso
- eng, English
Identifiers
dc:identifier.*- Identifier
- T 5681
- OAI identifier oai:identifier
- oai:repository.mines.edu:11124/15642